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Image acquisition device and image acquisition method

A technology for image acquisition and equipment, which is applied in the field of image acquisition equipment and image acquisition, and can solve the problems of image becoming noise and deteriorating detection accuracy

Inactive Publication Date: 2018-12-25
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, imaging above the pattern irradiation unit causes the pattern to appear on the captured image, and the image becomes a noise component
As a result, defect detection accuracy is degraded

Method used

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  • Image acquisition device and image acquisition method
  • Image acquisition device and image acquisition method
  • Image acquisition device and image acquisition method

Examples

Experimental program
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Embodiment Construction

[0013] An image acquisition apparatus and an image acquisition method according to an aspect of the present embodiment use a member and a first irradiation unit that irradiates a target. The member is configured such that a plurality of non-transmitting portions extending in a first direction and not transmitting at least a part of incident light are arranged at intervals of a period P in a second direction intersecting the first direction. The region of the object to be inspected irradiated by the first irradiation unit is imaged via this member. During the exposure of imaging the irradiated object to be inspected and acquiring an image, the component and the object to be inspected are relatively displaced in the second direction. The member may configure the second irradiating unit to irradiate the object under inspection in a second mode different from that of the first irradiating unit. Each of the plurality of non-transmitting portions has a length in the first direction...

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Abstract

The invention provides an image acquisition device and an image acquisition method. The image acquisition device includes a member having a plurality of non-transmissive portions that extends in a first direction and does not transmit at least a part of incident light. The plurality of non-transmissive portions are disposed in a second direction intersecting the first direction at intervals of a period P. The image acquisition device further includes a first illumination unit, an imaging unit that images an area of an illuminated target via the member, and a driving unit that relatively shiftsthe member and the target in the second direction during exposure for acquiring one image by imaging the target illuminated by the first illumination unit.

Description

technical field [0001] An aspect of an embodiment of the present disclosure relates to an image acquisition apparatus such as an optical evaluation apparatus for inspecting a test object, and an image acquisition method for acquiring an image of the test object to process the image. Background technique [0002] As techniques for detecting defects on the surface of a workpiece which is a glossy object to be inspected, Japanese Patent Nos. 5994419 and 4147682 discuss known techniques using A light source that emits light in a pattern illuminates the workpiece and a camera is used to image the light reflected by the workpiece. In the inspection method discussed in Japanese Patent No. 5994419, a workpiece is irradiated with light having periodically changing luminance, and the amplitude and average value of the luminance change of captured reflected light images are calculated. And a defect of the workpiece is detected based on the calculated value. In the inspection method d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/88G01B11/30
CPCG01B11/30G01N21/88G01N21/8806G01N2021/8829G06T7/521G06T2207/30164H04N23/56H04N23/951H04N23/74G06T7/40G06T7/0004H04N23/73
Inventor 桥口英则松田英树
Owner CANON KK