A position measurement sensor and position measurement system
A technology for measuring sensors and measuring systems, applied in measuring devices, measuring angles, instruments, etc., can solve the problems of interference of the equipment to be measured, the size of the space occupied by the measuring equipment, and difficulty in meeting the measurement requirements, and achieve the effect of real-time measurement.
Inactive Publication Date: 2020-01-31
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
[0003] The existing measurement method is the traditional contact measurement method, and the traditional contact measurement method usually has high requirements on the measurement environment, and the measurement equipment itself occupies a certain space size, which often causes interference to the equipment under test, so it is difficult to meet the measurement requirements
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[0020] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.
[0021] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " The orientation or positional relationship indicated by "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner" and "outer" are based on the orientation or position shown in the drawings The positional relationship is only for the convenience of describing the present invention and simplifying the description, but does not indica...
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The present invention provides a position measurement sensor including a first frame, a first PSD detector, a first laser and a semi-reflective beam splitter, the first PSD detector, the first laser and the semi-reflective The semi-transparent beam splitters are all arranged on the first frame, the semi-reflective and semi-transparent beam splitters are located at the front end of the first PSD detector, and a part of the laser light directed to the first PSD detector passes through The semi-reflective beam splitter shoots to the first PSD detector, and the other part is reflected by the semi-reflective beam splitter; the present invention also provides a position measurement system based on the above-mentioned position measurement sensor , capable of non-contact, high-precision real-time measurement.
Description
technical field [0001] The invention relates to the technical field of position measurement by using an optical path, in particular to a position measurement sensor and a position measurement system. Background technique [0002] In the field of high-precision precision instrument and equipment manufacturing, such as large aerospace cameras, telescopes, large-scale high-end linkage equipment, etc., there is a high requirement for the stability of the structural support part, and the measurement accuracy is usually on the order of microns. [0003] The existing measurement method is the traditional contact measurement method, and the traditional contact measurement method usually has high requirements on the measurement environment, and the measurement equipment itself occupies a certain space size, which often causes interference to the equipment under test, so it is difficult to meet the measurement requirements. Contents of the invention [0004] The present invention ai...
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IPC IPC(8): G01B11/00G01C1/00
CPCG01B11/00G01C1/00
Inventor 薛金来聂婷毕国玲梁怀丹张星祥陈长征
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI