Fast calibration method for four-quadrant photodetector position measurement
A technology of photodetector and calibration method, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problem of spending a lot of time
Active Publication Date: 2020-02-14
TIANJIN UNIV
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Problems solved by technology
Therefore, when performing long-distance measurements, the four-quadrant photodetector needs to be calibrated at different measurement distances, which will take a lot of time. At this time, it is very important to find a fast calibration method for the four-quadrant photodetector.
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[0032] The present invention will be further described in detail below in conjunction with the drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.
[0033] The invention provides a fast calibration method for position measurement of a four-quadrant photoelectric detector, which is mainly composed of the following two parts:
[0034] The first part is the fast calibration method of the four-quadrant photoelectric detector for position measurement at a fixed measurement distance;
[0035] The four-quadrant photodetector can measure the position of the spot in the x and y directions, such as figure 1 , The laser is irradiated to the photosensitive surface of the four-quadrant photodetector, and the spot centroid position is (x 0 ,y 0 ), the photocurrent generated by the first quadrant of the photosensitive surface of the four-quadrant photodetecto...
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The invention discloses a fast calibration method for four-quadrant photodetector position measurement. According to the fast calibration method for four-quadrant photodetector position measurement, afour-quadrant photodetector position measurement model is established, a displacement measurement standard device is used for calibrating a four-quadrant photodetector, a laser cross-section radius at the measurement distance is obtained by a least square method, and the laser cross-section radius is substituted into the position measurement model to realize the position measurement at the measurement distance. In addition, the invention further provides a method for quickly obtaining the laser cross-section radius at different measurement distances, laser cross-section radii at several different measurement distances can be obtained through calibration, a Levenberg-Marqurdt method is used for obtaining a laser beam waist radius and a beam waist position, and then the laser cross-sectionradii at any position can be obtained; and the four-quadrant photodetector measurement model is used for achieving position measurement at different distances.
Description
Technical field [0001] The invention belongs to the technical field of instrumentation, in particular to a fast calibration method for position measurement of a four-quadrant photoelectric detector. Background technique [0002] The four-quadrant photodetector is a photodetector made of four photodiodes with exactly the same performance arranged in accordance with the requirements of rectangular coordinates. It has the advantages of high detection sensitivity, simple signal processing and strong anti-interference ability. It is often used in laser guidance and laser alignment. Straight measurement. Three-axis CNC machine tools have 21 geometric errors, which are the six degrees of freedom error corresponding to each axis and the orthogonal error between every two axes. The six degrees of freedom error includes positioning error, two-dimensional straightness error, pitch angle, and deviation. Swing angle and roll angle, so the straightness error occupies an important proportion i...
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IPC IPC(8): G01B11/00G01B11/27
CPCG01B11/002G01B11/272
Inventor 段发阶张聪傅骁刘文正苏宇浩余珍鑫许昊宇
Owner TIANJIN UNIV