A Fast Calibration Method for Position Measurement of Four-quadrant Photodetector
A technology of photodetectors and calibration methods, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve problems such as taking a long time
Active Publication Date: 2021-02-19
TIANJIN UNIV
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Problems solved by technology
Therefore, when performing long-distance measurements, the four-quadrant photodetector needs to be calibrated at different measurement distances, which will take a lot of time. At this time, it is very important to find a fast calibration method for the four-quadrant photodetector.
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[0032] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0033] The present invention provides a rapid calibration method for measuring the position of a four-quadrant photoelectric detector, which mainly consists of the following two parts:
[0034] The first part, a rapid calibration method for position measurement of four-quadrant photodetectors at a fixed measurement distance;
[0035] The four-quadrant photodetector can measure the position of the light spot in the x and y directions, such as figure 1 , the laser is irradiated onto the photosensitive surface of the four-quadrant photodetector, and the position of the center of mass of the spot is (x 0 ,y 0 ), the photocurrent produced by the first quadrant of the photosensitive surf...
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The invention discloses a rapid calibration method for measuring the position of a four-quadrant photoelectric detector. The method of the invention establishes a position measurement model of a four-quadrant photoelectric detector, and uses a displacement measurement standard device to calibrate the four-quadrant photoelectric detector. Calculate the laser cross-section radius at the measurement distance by multiplication, and substitute into the position measurement model to realize the position measurement at the measurement distance; in addition, the present invention also provides a method for quickly obtaining the laser cross-section radius at different measurement distances, and obtains several different measurement points through calibration. For the laser section radius at a distance, use the Levenberg-Marquardt method to obtain the laser beam waist radius and beam waist position, and then obtain the laser section radius at any position, and use the four-quadrant photodetector measurement model to achieve position measurement at different distances.
Description
technical field [0001] The invention belongs to the technical field of instruments and meters, in particular to a rapid calibration method for position measurement of a four-quadrant photodetector. Background technique [0002] The four-quadrant photodetector is a photodetector device that arranges four photodiodes with exactly the same performance according to the requirements of rectangular coordinates. It has the advantages of high detection sensitivity, simple signal processing and strong anti-interference ability. It is often used in laser guidance and laser alignment. measuring directly. The three-axis CNC machine tool has 21 geometric errors, which are the six-degree-of-freedom error corresponding to each axis and the orthogonal error between each two axes, and the six-degree-of-freedom error includes positioning error, two-dimensional straightness error, pitch angle, and deviation. Swing angle and roll angle, so straightness error occupies an important proportion in...
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IPC IPC(8): G01B11/00G01B11/27
CPCG01B11/002G01B11/272
Inventor 段发阶张聪傅骁刘文正苏宇浩余珍鑫许昊宇
Owner TIANJIN UNIV