Separable vacuum interconnected system

Abstract

The invention discloses a separable vacuum interconnected system. The separable vacuum interconnected system comprises a main interconnected pipeline, a main interconnected fixing device, multiple movable separated devices and an integrated constant temperature platform, wherein the main interconnected fixing device is arranged on the main interconnected pipeline; the multiple movable separated devices comprise movable high vacuum growing equipment, mobile non-high-vacuum growing equipment, mobile vacuum measuring equipment, a vacuum constant temperature sample transmission trolley and a mobile vacuum pump truck system, wherein the movable separated devices can be connected to and detached from the main interconnected pipeline and can be combined with and separated from the main interconnected fixing device; and meanwhile, the multiple movable separated devices can be singly used or each two of the multiple movable separated devices are combined and connected at will to form an integrated chamber; and the integrated constant temperature platform is used for in-situ and constant temperature transmission of samples. The separable vacuum interconnected system, disclosed by the invention, has the advantages that the use is flexible and convenient, the floor space of each separated device is small, requirements on indoor space and load are smaller, and meanwhile, various pump body resources are sufficiently utilized by using the separated design, so that the cost of a vacuum interconnected device is greatly reduced.

Description

technical field [0001] The disclosure belongs to the field of vacuum interconnection instruments, and relates to a separable vacuum interconnection system. Background technique [0002] In recent years, with the improvement of sample growth technology and testing technology, more and more growth and testing characterizations rely on vacuum environment, especially high vacuum environment. The growth and measurement equipment currently used in high vacuum mainly include the following types: (1) Molecular Beam Epitaxy (MBE, Molecular Beam Epitaxy) and various evaporation equipment; (2) Magnetron sputtering equipment; (3) Laser-assisted deposition Equipment; (4) chemical vapor deposition; (5) atomic layer deposition, etc.; (6) equipment based on surface characterization, including: scanning tunneling microscope, atomic force microscope, X-ray photoelectron spectroscopy, etc.; (7) micro-nano and cryogenic equipment . Among these growth and measurement instruments and equipment,...

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Problems solved by technology

[0003] In the existing vacuum interconnection equipment, there are the following problems: 1. The vacuum interconnection device occupies a large area. In order to cooperate with the interconnection between devices, a laboratory or factory building with a large span is required to support it; 2. The large interconnection device is not flexible enough: especially the device that uses a linear transmission trolley to

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