Disk surface flatness detection device of large polishing machine, and working method thereof

Abstract

The invention discloses a polishing disk flatness detection device of a large polishing machine, and a working method thereof. The device comprises a base, a gas hydrostatic bearing unit, a swing arm,a distance sensor, a polishing disk, a hydraulic turntable and an industrial control computer; the polishing disk is installed on the hydraulic turntable; the gas hydrostatic bearing unit and the hydraulic turntable are fixed on the base in parallel; and two ends of the swing arm are separately connected with a gas hydrostatic spindle and the distance sensor. According to the disk surface flatness detection device of the large polishing machine, and the working method thereof in the invention, the swing arm is driven by the gas hydrostatic spindle, so that the flatness measurement of the polishing disk of the polishing machine is completed; the rotation motion precision can be up to 0.1 mu m; compared with the traditional hydraulic platform, the rotation motion precision is increased by at least 50%; the rigidity, which is the same as the rigidity of the ordinary gantry measuring device, can be obtained; the space over the polishing disk cannot be excessively occupied; the polishing disk is conveniently assembled and disassembled; the in-site measurement mode is used in the invention; and the labour and time costs for disassembling and assembling the polishing disk can be reduced.

Description

technical field [0001] The invention relates to the field of measuring equipment, in particular to a large-scale polishing machine disk flatness detection device and a working method thereof, which are suitable for measuring the flatness of large-sized polishing disks of the polishing machine on-site. Background technique [0002] In the ring polishing technology, the surface of the processing element is in direct contact with the polishing disc, and the surface of the polishing disc is attached to the surface of the polishing disc by external force or the weight of the workpiece to complete the polishing with the rotation of the polishing disc. Therefore, the surface morphology of the polishing disc will directly affect the final processing quality of the workpiece. influences. The diameter of the polishing disc of a large polishing machine is generally more than 1m, and the mass can reach 1t. It is difficult to load, unload and transport, and it is difficult to meet the fl...

AI Technical Summary

Problems solved by technology

However, this patent adopts a gantry structure. Under the condition of a large polishing disc with a diameter of 1.5m, the length of the linear guide rail is at least 1.8m. Under this length condition, the movement accuracy of the probe is difficult to guarantee, and the cost is high.

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