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Fluid circuit with integrated electrostatic discharge mitigation

A fluid circuit and fluid technology, applied in the direction of membrane, separation method, filtration separation, etc., can solve the problems of circuit damage to photoactive compounds, damage, substrate damage, etc.

Active Publication Date: 2019-02-05
ENTEGRIS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The substrate is highly sensitive and such discharges can lead to damage or destruction of the substrate
For example, circuits on the substrate may be destroyed and photoactive compounds may be activated prior to conventional exposure
Additionally, accumulated static charges can discharge from within the fluid handling system to the external environment, potentially damaging components in the pipeline (e.g., conduits, fittings, containers, filters, etc.) and causing fluid leaks, spills and component damage in the system. weakening performance of

Method used

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  • Fluid circuit with integrated electrostatic discharge mitigation
  • Fluid circuit with integrated electrostatic discharge mitigation
  • Fluid circuit with integrated electrostatic discharge mitigation

Examples

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Embodiment Construction

[0042] figure 2 A fluid handling system 150 is depicted in accordance with one or more embodiments of the invention. System 150 provides a flow path for fluid to flow from fluid supply 152 to one or more process stages 156 positioned downstream. System 150 includes a fluid circuit 160 that includes a portion of the flow path of fluid handling system 150 . Fluid circuit 160 includes a conduit segment 164 and a plurality of operating components 168 interconnected via conduit segment 164 . exist figure 2 Depicted in , operating assembly 168 includes elbow fitting 170 , T-fitting 172 , valve 174 , filter 176 and flow sensor 178 . However, in various embodiments, fluid circuit 160 may include additional or fewer operative components 168 in number and type. For example, fluid circuit 160 may alternatively or additionally include pumps, mixers, dispense heads, nozzles, pressure regulators, flow controllers, or other types of operating components. When assembled, the handling a...

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Abstract

A fluid circuit (160) defining a flow path for a fluid from a fluid supply (152) toward a process stage (156). The fluid circuit may include a plurality of operative components (168) including a bodyportion (182) and a plurality of tubing connector fittings (186). The operative components may be connected by a plurality of tubing segments (164). Each body portion may include a non-conductive fluoropolymer portion and an outer conductor (234) that extends between each of the plurality of tubing connector fittings and that is unitary with the non-conductive fluoropolymer portion. The pluralityof tubing segments may include a non-conductive fluoropolymer tubing portion (187) and an axial strip (188) of conductive polymer. The outer conductor of each body portion conductively connected withtubing segments connected thereto. Each of the connectors may include a bridging component (262) for conductively connecting the respective outer conductor of the body portion to the strip of conductive polymer of the connecting tubing segments.

Description

[0001] Related applications [0002] This article asserts the benefit of priority under 35 U.S.C. §119 to U.S. Provisional Patent Application No. 62 / 344,171, filed June 1, 2016, and U.S. Provisional Patent Application No. 62 / 344,168, filed June 1, 2016. The disclosure of US Provisional Patent Application No. 62 / 344,171 is incorporated herein by reference in its entirety for all purposes. This application is an application for U.S. Provisional Patent Application No. 62 / 344,168, filed June 1, 2016, entitled "CONDUCTIVE FILTER DEVICE," which is owned by the proprietor of the present application and filed on the same date as the present application, which is hereby incorporated by reference in its entirety, except for the express definitions and patent claims contained therein. technical field [0003] Embodiments of the invention relate to fluid handling systems, and more particularly, to ultrapure fluid handling systems with electrostatic discharge suppression. Background te...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16L25/01F16L47/04
CPCB01D63/067B01D67/0088B01D71/32F16L47/04B01D2201/50B01D2313/44B01D2325/26F16L25/01B01D69/107B01D2239/0478B01D2239/0241B01D39/1692B01D2239/0654
Inventor J·利斯
Owner ENTEGRIS INC