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Method for processing several masks in a vacuum coating process, method for processing a substrate by depositing several layers of different materials on the substrate and apparatus for coating a substrate

A coating process, mask technology, applied in the field of masks with different coating application times, processing substrates, and equipment for coating substrates

Active Publication Date: 2021-04-02
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

So, the mask has to be replaced from time to time when the openings of the mask start to clog

Method used

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  • Method for processing several masks in a vacuum coating process, method for processing a substrate by depositing several layers of different materials on the substrate and apparatus for coating a substrate
  • Method for processing several masks in a vacuum coating process, method for processing a substrate by depositing several layers of different materials on the substrate and apparatus for coating a substrate
  • Method for processing several masks in a vacuum coating process, method for processing a substrate by depositing several layers of different materials on the substrate and apparatus for coating a substrate

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Embodiment Construction

[0015] Detailed reference will be made to several implementations, one or more examples of which are illustrated in the accompanying drawings. Each example is provided by way of illustration and not meant to be a limitation. For example, features illustrated or described as part of one embodiment can be used on or combined with any other embodiment to yield still a further embodiment. It is meant that the present disclosure includes such adjustments and changes.

[0016] In the description of the drawings below, the same reference numerals mean the same or similar components. In general, only the differences with respect to corresponding embodiments are described. Unless otherwise stated, descriptions of a part or aspect in one embodiment also apply to corresponding parts or aspects in another embodiment.

[0017] figure 1 Shown is a schematic layout of an apparatus 100 for coating a substrate configured to operate according to the methods described herein.

[0018] The a...

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Abstract

A method for processing several masks in a vacuum coating process. Each mask is configured to use a predetermined coating application time in the coating process. The method includes: providing a number of cassettes, each cassette having a number of mask slots; and sorting the number of masks into at least two cluster groups according to a coating application time for each mask. The method further includes assigning the at least two cluster groups to one or more of the number of cassettes; and storing the number of masks in the number of cassettes based on the assignment.

Description

technical field [0001] Several embodiments of the present disclosure relate to methods of processing masks, particularly masks with different coating application times. Several embodiments of the present disclosure also relate to processing substrates, particularly for depositing two, three or more different materials on multiple substrates. Additionally, several embodiments of the present disclosure relate to apparatus for coating substrates. Several embodiments relate in particular to a method for processing a substrate, and an apparatus for coating a substrate, wherein a mask is used for depositing predetermined structures on the substrate. Background technique [0002] Optoelectronic devices using organic materials have become popular for several reasons. Many of the materials used to make these devices are relatively inexpensive, so organic optoelectronic devices have the potential for cost advantages over inorganic devices. Inherent properties of organic materials, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/56C23C14/12C23C14/04C23C16/04
CPCC23C14/042C23C14/12C23C14/56C23C16/042H01L21/67017H01L21/67271H01L21/02631H01L21/0337G03F7/70733H01L21/67745H01L21/67276H01L21/67126H10K71/166H10K71/00
Inventor 塞巴斯蒂安·巩特尔·臧安德烈亚斯·索尔
Owner APPLIED MATERIALS INC
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