Substrate and alignment method and equipment
A substrate and alignment mark technology, which is used in image enhancement, instrumentation, semiconductor/solid-state device testing/measurement, etc., can solve the problems of alignment mark pollution, low accuracy of automatic crimping, etc., and achieve the effect of ensuring correct alignment
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[0053] In order to make the technical problems, technical solutions and advantages to be solved by the embodiments of the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.
[0054] Embodiments of the present invention provide a substrate and an alignment method and equipment, which can ensure correct alignment between the substrate and the substrate to be aligned.
[0055] An embodiment of the present invention provides a substrate, the substrate is provided with a substrate alignment mark, and the substrate is also provided with an additional alignment mark different in shape from the substrate alignment mark.
[0056]In this embodiment, an additional alignment mark different in shape from the substrate alignment mark is added to the substrate, so that the additional alignment mark can be grasped after the substrate alignment mark is contaminated, resulting in failure or error in grabbing the substrate ali...
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