A vacuum coating system for preparing metal-polymer multilayer composite films
A multi-layer composite and vacuum coating technology, which is applied in vacuum evaporation coating, metal material coating process, ion implantation coating, etc., can solve problems such as financial burden and increased system maintenance troubles, so as to avoid interference and submit coating speed effect
Active Publication Date: 2021-03-02
CHENGDU TOMI SHUANG DU OPTOELECTRONICS CO LTD
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Problems solved by technology
[0002] At present, most sputtering and gas-phase chemical reactions are carried out separately. This is to avoid interference between different processes. If you want to study metal-polymer composite films, you must use two sets of vacuum coating systems. It is undoubtedly a big burden on funds, and it also increases the trouble of system maintenance. The biggest disadvantage is that it cannot be continuously coated under vacuum to form a metal-polymer multilayer composite film.
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Embodiment 1
[0033] A kind of vacuum coating system for preparing metal-macromolecule multilayer composite film provided in this embodiment, such as figure 1 As shown, it includes: a vacuum chamber 1, a mass flow control system 2, a vacuum pumping system 3 and a plasma power supply 4;
[0034] The vacuum chamber 1 is provided with an air inlet pipe 5 and an air suction pipe 30; the vacuum air pump system 3 communicates with the inside of the vacuum chamber 1 through the air suction pipe 30; the mass flow control system 2 passes through the air inlet pipe 5 It communicates with the inside of the vacuum chamber 1, and is used to continuously fill the inside of the vacuum chamber 1 with gas for generating plasma, and intermittently fill the reactants;
[0035]The inside of the vacuum cavity 1 is provided with an upper electrode 11, a lower electrode 12 and a substrate holder 13; the substrate holder 13 is located between the upper electrode 11 and the lower electrode 12, and is used to fix th...
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The invention discloses a vacuum coating system for preparing a metal-macromolecule multilayer composite film, comprising: a vacuum cavity, a mass flow control system, a vacuum pumping system and a plasma power supply; the vacuum cavity is set There are air intake pipes and exhaust pipes; the vacuum pumping system communicates with the inside of the vacuum chamber through the air suction pipe; the mass flow control system communicates with the inside of the vacuum chamber through the air intake pipe; the inside of the vacuum chamber is set There are an upper electrode, a lower electrode and a substrate holder; the substrate holder is located between the upper electrode and the lower electrode; a target holder is arranged on the upper part of the lower electrode; both the upper electrode and the lower electrode are connected to the plasma power supply device. Through the application of plasma in physical vapor deposition and chemical vapor deposition, the present invention designs a vacuum film system capable of polymer polymerization and metal sputtering, and can prepare metal-polymer multilayer composite films on a single substrate.
Description
technical field [0001] The invention relates to a vacuum coating system, in particular to a vacuum coating system for preparing metal-polymer multilayer composite films. Background technique [0002] At present, most sputtering and gas-phase chemical reactions are carried out separately. This is to avoid interference between different processes. If you want to study metal-polymer composite films, you must use two sets of vacuum coating systems. Undoubtedly, it is a big financial burden, and it also increases the trouble of system maintenance. The biggest disadvantage is that it cannot be continuously coated under vacuum to form a metal-polymer multilayer composite film. [0003] The application of plasma in chemical vapor deposition (PECVD) is to excite the reacting substances from the ground state (groundState) to the excited state (Excitation State), and generate a large number of active free radicals (Free Radical), in the plasma polymerization ( In Plasma Polymerization...
Claims
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IPC IPC(8): C23C14/35C08J5/18C08L83/04
Inventor 张锡强李欢乐王茜李珪赵羽晴余赐贤
Owner CHENGDU TOMI SHUANG DU OPTOELECTRONICS CO LTD