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A Microactuator with Customizable Structural Stiffness

A technology of structural rigidity and micro-action, applied in the directions of generators/motors, electrostatic generators/motors, electrical components, etc., can solve the problems of difficult integration, limited range of rigidity adjustment, complex device structure, etc., to reduce the complexity. Effect

Active Publication Date: 2019-12-27
SHANGHAI JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the performance of the driver has been significantly improved, it still has the following disadvantages: the driver needs to introduce a larger cam support block, the device structure is more complicated, and the initial contact between the beam and the cam needs to be manually promoted, and it is difficult to integrate into the existing device In the structural scheme, at the same time, from the principle point of view, its stiffness adjustment range is limited, and it is difficult to achieve a wide range of flexible adjustments according to the requirements of different types of drives

Method used

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  • A Microactuator with Customizable Structural Stiffness
  • A Microactuator with Customizable Structural Stiffness
  • A Microactuator with Customizable Structural Stiffness

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] like figure 1 As shown, this embodiment is a schematic structural diagram of a micro-actuator with a customizable structural rigidity, which can realize a rigid-adjustable micro-mechanical actuator for in-plane motion. The micro-actuator includes: a moving pole plate 1, a fixed pole plate 2, a folding spring 6, a stop block 16, a first anchor point 4, and a second anchor point 5, wherein the moving pole plate 1 is fixed to the first anchor point through the folding spring 6. On one anchor point 4 , the stator plate 2 is connected to the second anchor point 5 . The micro-actuator also includes an outer frame 3, a third anchor point 14, a fourth anchor point 15, a first top rod 9, and a second top rod 10, wherein the first top rod 9 and the second top rod 10 are symmetrically arranged on the On both sides of the movable pole plate 1, the length direction of the first ejector rod 9 and the second ejector rod 10 is parallel to the moving direction of the movable pole plate...

Embodiment 2

[0051] On the basis of Embodiment 1, the difference in this embodiment is: figure 2 As shown, the first top rod 9 and the second top rod 10 are respectively composed of a first cantilever beam 11 and a second cantilever beam 17 in parallel, and the free ends of the first cantilever beam 11 and the second cantilever beam 17 pass through a thick and short The beams 13 are connected, and the lower right corner of the thick and short beams 13 is a rounded curved surface 12 . The curvature of the rounded curved surface 12 must be smaller than the initial curvature of the first pre-made curve profile 7 and the second pre-made curved profile 8 to ensure that the rounded curved surface 12 and the first pre-made curved profile 7 and the second pre-made curved profile 8 are in the initial No interference occurs during contact.

[0052] In this embodiment, the heights of the designed first pre-made curved profile 7 and the second pre-made curved profile 8 in the vertical direction need...

Embodiment 3

[0055] On the basis of Embodiment 1, the difference in this embodiment is: image 3 As shown, the folding spring 6 is composed of a plurality of cantilever beams connected in parallel and / or in series through thick and short beams 13, one end of which is connected to the outer frame 3, the other end is connected to the first anchor point 4, and is symmetrically distributed inside the outer frame 3, The outer frame 3 and the moving plate 1 are supported, which makes the overall structure of the micro-actuator more compact. The length of the folding spring 6 is 800 microns and the width is 6 microns. The lower stiffness in the horizontal direction enables the micro-actuator to have a wider range of variable stiffness.

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Abstract

The invention provides a rigidity-customizable microactuator, which comprises an outer frame, a third anchor point, a fourth anchor point, a first ejector rod and a second ejector rod. The first ejector rod and the second ejector rod are symmetrically arranged on the two sides of a movable polar plate. The length directions of the first ejector rod and the second ejector rod are parallel to the moving direction of the movable polar plate. One side of the outer frame is connected with the movable polar plate. A first predetermined curve contour and a second predetermined curve contour are symmetrically arranged at the upper end and the lower end of the outer frame. The curved surfaces of the first predetermined curve contour and the second predetermined curve contour respectively correspondto the free ends of the first ejector rod and the second ejector rod. When the movable polar plate moves in the horizontal direction under the action of the electrostatic force, the free end of the first ejector rod and the free end of the second ejector rod slide along the first preset curve contour and a second preset curve contour on the outer frame respectively. In this way, an acting force in the horizontal direction is generated. According to the working condition characteristics of different driving modes, the flexible demand on the specific rigidity-displacement character of the microactuator can be met.

Description

technical field [0001] The invention relates to a micro-mechanical actuator in the technical field of precision machinery, in particular to a micro-actuator whose structural rigidity can be customized. Background technique [0002] As a basic electronic component, electrostatic micromechanical actuators are widely used in micro motors, dispersers, micro clamps, digital micro mirrors and various micro optical switches. At present, the engineering application of micromechanical actuators is ready to appear, but to truly promote the application on a large scale, it is necessary to greatly improve the operable range and reliability of the device. Electrostatic micromechanical actuator is a driving device powered by electrostatic attraction. Since the electrostatic force is inherently highly nonlinear, when the driving voltage exceeds a critical value, the electrostatic micromechanical actuator will become unstable. For a parallel-plate electrostatic actuator supported by a line...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N1/00
Inventor 戴旭涵向小健王凯丁桂甫赵小林
Owner SHANGHAI JIAOTONG UNIV