Unlock instant, AI-driven research and patent intelligence for your innovation.

A micro-actuator with large controllable stroke

A technology of micro-actuation and stroke, applied in the direction of relays, electromagnetic relays, detailed information of electromagnetic relays, etc., can solve the problems of complex device structure, difficult application of out-of-plane motion actuators, and difficult miniaturization, so as to simplify the device structure, Improve controllable output stroke, reduce the effect of analysis

Active Publication Date: 2019-06-14
SHANGHAI JIAOTONG UNIV
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the performance of the driver has been significantly improved, there are still the following deficiencies: the driver is only suitable for in-plane motion, and it is difficult to apply it to out-of-plane motion actuators. Complex, difficult to further miniaturize

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A micro-actuator with large controllable stroke
  • A micro-actuator with large controllable stroke
  • A micro-actuator with large controllable stroke

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] Such as Figure 1a , 1b As shown, this embodiment provides a micromechanical actuator with a simple structure and a large controllable stroke that can realize out-of-plane motion.

[0038] The micromechanical actuator with a large controllable stroke in this embodiment includes: a movable plate 1 , a plate base 2 , an embedded nickel plate spring 3 , and a fixed plate 4 . in:

[0039] The fixed plate 4 is composed of an insulating layer 5 and a nickel plate 7;

[0040] The insulating layer 5 is a silicon dioxide insulating layer;

[0041] The moving plate 1 is a nickel moving plate;

[0042] The pole plate base 2 is a nickel pole plate base;

[0043] The plate base 2 is located on both sides of the fixed plate 4, the movable plate 1 is fixed directly above the fixed plate 4 through the embedded nickel plate spring 3 and the plate base 2, and can be moved up and down relative to the fixed plate 4 sports;

[0044] The insulating layer 5 is arranged on the upper surf...

Embodiment 2

[0051] On the basis of Embodiment 1, the difference in this embodiment is that: the movable pole plate 1 includes reinforcing ribs 6 to ensure that the structural rigidity of the movable pole plate 1 itself is much greater than the rigidity of the embedded nickel pole plate spring 3. When the moving plate 1 of the micromechanical actuator moves up and down, it maintains a translational state without twisting, thereby ensuring that the working air gaps 8 at different plane positions under the moving plate 1 remain consistent.

Embodiment 3

[0053] Such as Figure 2a , 2b As shown, this implementation provides a micromechanical actuator with a simple structure and a large controllable stroke that can realize out-of-plane motion.

[0054] The micromechanical actuator with a large controllable stroke in this embodiment includes: a moving plate 1, a plate base 2, an embedded nickel plate spring 3, and a fixed plate 4; wherein:

[0055] The fixed plate 4 is composed of an insulating layer 5 and a driving coil 9;

[0056] The insulating layer 5 is a polyimide insulating layer.

[0057] The moving plate 1 is a nickel moving plate;

[0058] The pole plate base 2 is a nickel pole plate base;

[0059] The plate base 2 is located on both sides of the drive coil 9, and the movable plate 1 is fixed directly above the drive coil 9 through the embedded nickel plate spring 3 and the plate base 2, and can move up and down relative to the drive coil 9 ;

[0060] The insulating layer 5 is arranged on the upper surface of the ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a large controllable stroke micro actuator. The actuator comprises a moving pole plate, a pole plate pedestal, an embedded nickel pole plate spring and a static pole plate. Theembedded nickel pole plate spring is in a ''one'' shape, is stretched into a center of the moving pole plate and is symmetrically arranged on two sides of the center of the moving pole plate along a central axis of the moving pole plate. One end of the embedded nickel pole plate spring is fixedly arranged on a middle point of the pole plate pedestal at a length direction, and the other end is fixedly arranged on the center of the moving pole plate. An elastic restoring force generated by the embedded nickel pole plate spring during a moving process of the moving pole plate is nonlinearly related to a spring deformation amount. In the invention, a controllable stroke of a micro mechanical actuator is obviously increased, a driving voltage is reduced, simultaneously, an adverse effect on a response speed is reduced.

Description

technical field [0001] The invention relates to a micro-mechanical actuator in the technical field of precision machinery, in particular to a micro-actuator with a large controllable stroke. Background technique [0002] Devices such as optical switches, micro-relays and radio frequency switches based on MEMS technology are the basic key devices used in future all-optical communication networks, advanced instrumentation and control systems, phased array radar and mobile communications. Such devices usually work in the on and off state, the driving range is from a few microns to 100 microns, the driving force is on the order of micronewtons to millinewtons, and the response time is on the order of milliseconds to microseconds, requiring low power consumption, low voltage, and responsiveness. Fast and long life. Currently such devices are usually based on electrostatic drive or electromagnetic drive principles. For the actuators of these two driving principles, since both th...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01H50/00H01H59/00
CPCH01H50/005H01H59/0009
Inventor 戴旭涵向小健孙诗丁桂甫赵小林
Owner SHANGHAI JIAOTONG UNIV