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Rigidity-customizable microactuator

A micro-motion and stiffness technology, applied in the direction of generator/motor, electrostatic generator/motor, electrical components, etc., can solve the problems of difficult integration, complex device structure, limited stiffness adjustment range, etc., and achieve the effect of reducing complexity

Active Publication Date: 2019-05-24
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the performance of the driver has been significantly improved, it still has the following disadvantages: the driver needs to introduce a larger cam support block, the device structure is more complicated, and the initial contact between the beam and the cam needs to be manually promoted, and it is difficult to integrate into the existing device In the structural scheme, at the same time, from the principle point of view, its stiffness adjustment range is limited, and it is difficult to achieve a wide range of flexible adjustments according to the requirements of different types of drives

Method used

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  • Rigidity-customizable microactuator
  • Rigidity-customizable microactuator
  • Rigidity-customizable microactuator

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] Such as figure 1 As shown, it is a schematic structural diagram of a micro-actuator with customizable stiffness in this embodiment, which is a micro-mechanical actuator with adjustable stiffness that can realize in-plane motion. The micro-actuator includes: a moving plate 1, a fixed plate 2, a folding spring 6, a stop block 16, a first anchor point 4, and a second anchor point 5, wherein the moving plate 1 is fixed to the second anchor point by the folding spring 6. On one anchor point 4, the fixed pole plate 2 is connected to the second anchor point 5. The micro-actuator also includes an outer frame 3, a third anchor point 14, a fourth anchor point 15, a first push rod 9, and a second push rod 10, wherein the first push rod 9 and the second push rod 10 are symmetrically arranged on On both sides of the moving pole plate 1, the length direction of the first ejector rod 9 and the second ejector rod 10 is parallel to the moving direction of the moving pole plate 1, and o...

Embodiment 2

[0054] On the basis of embodiment 1, the difference in this embodiment is: as figure 2 As shown, the first push rod 9 and the second push rod 10 are respectively composed of the first cantilever beam 11 and the second cantilever beam 17 connected in parallel, and the free ends of the first cantilever beam 11 and the second cantilever beam 17 pass through a thick and short The beams 13 are connected, and the lower right corner of the thick and short beams 13 is a rounded curved surface 12 . The curvature of the fillet curved surface 12 must be less than the initial curvature of the first preset curve profile 7 and the second preset curve profile 8, ensuring that the fillet curved surface 12 and the first preset curve profile 7 and the second preset curve profile 8 are at the initial stage No interference occurs on contact.

[0055]In this embodiment, the height of the designed first predetermined curved profile 7 and the second predetermined curved profile 8 in the vertical d...

Embodiment 3

[0058] On the basis of embodiment 1, the difference in this embodiment is: as image 3 As shown, the folding spring 6 is composed of a plurality of cantilever beams connected in parallel and / or in series through thick and short beams 13, one end of which is connected to the outer frame 3, and the other end is connected to the first anchor point 4, and is symmetrically distributed inside the outer frame 3, The outer frame 3 and the movable plate 1 are supported, which makes the overall structure of the micro-actuator relatively compact. The folded spring 6 has a length of 800 microns and a width of 6 microns, and the lower stiffness in the horizontal direction enables the micro-actuator to have a wider variable stiffness range.

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Abstract

The invention provides a rigidity-customizable microactuator, which comprises an outer frame, a third anchor point, a fourth anchor point, a first ejector rod and a second ejector rod. The first ejector rod and the second ejector rod are symmetrically arranged on the two sides of a movable polar plate. The length directions of the first ejector rod and the second ejector rod are parallel to the moving direction of the movable polar plate. One side of the outer frame is connected with the movable polar plate. A first predetermined curve contour and a second predetermined curve contour are symmetrically arranged at the upper end and the lower end of the outer frame. The curved surfaces of the first predetermined curve contour and the second predetermined curve contour respectively correspondto the free ends of the first ejector rod and the second ejector rod. When the movable polar plate moves in the horizontal direction under the action of the electrostatic force, the free end of the first ejector rod and the free end of the second ejector rod slide along the first preset curve contour and a second preset curve contour on the outer frame respectively. In this way, an acting force in the horizontal direction is generated. According to the working condition characteristics of different driving modes, the flexible demand on the specific rigidity-displacement character of the microactuator can be met.

Description

technical field [0001] The invention relates to a micro-mechanical actuator in the technical field of precision machinery, in particular to a micro-actuator with customizable stiffness. Background technique [0002] Electrostatic micromechanical actuators, as a basic electronic component, have a wide range of applications in micromotors, dispersers, microclamps, digital micromirrors and various micro-optical switches. At present, the engineering application of micromechanical actuators is on the verge of coming out, but to truly promote the application on a large scale, it is necessary to greatly improve the operable range and reliability of the device. The electrostatic micro-mechanical actuator is a driving device powered by electrostatic attraction. Since the electrostatic force is highly nonlinear in nature, when the driving voltage exceeds a critical value, the electrostatic micro-mechanical actuator will be unstable. For use For parallel-plate electrostatic actuators ...

Claims

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Application Information

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IPC IPC(8): H02N1/00
Inventor 戴旭涵向小健王凯丁桂甫赵小林
Owner SHANGHAI JIAO TONG UNIV