MEMS micro-heater with an integrated temperature sensor

A temperature sensor and micro-heater technology, applied in the sensor application field, can solve the problems that the chip cannot be completely packaged, the temperature measurement of the micro-heater is difficult, and the temperature state of the micro-heater cannot be accurately measured. The effect of low power consumption and short response time

Inactive Publication Date: 2019-05-28
翼捷安全设备(昆山)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] At this stage, an infrared thermal imager is used to analyze the temperature of the micro-heater in the working state, but this method requires professional infrared thermal imager equipment, and the chip cannot be completely packaged; it is impossible to accurately measure the temperature state of the micro-heater, especially After the micro-heater is coated with a gas-sensitive material or a black-body infrared material and packaged, it is difficult to measure the actual temperature of the micro-heater

Method used

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  • MEMS micro-heater with an integrated temperature sensor
  • MEMS micro-heater with an integrated temperature sensor

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Embodiment

[0021] see Figure 1 to Figure 2 , the present embodiment shows a MEMS micro heater with an integrated temperature sensor, including a silicon substrate 1, which is sequentially arranged on the silicon substrate 1 to carry out a variety of MEMS processing processes to obtain an insulating and heat-insulating layer 2, an insulating layer B3, an insulating layer A4;

[0022] The insulating layer A4 is provided with a heating layer accommodation groove corresponding to the end plane of the insulating layer B3, and the insulating layer B3 is provided with a temperature sensor accommodation groove on the end plane facing away from the insulating layer A4, and the heating layer accommodation groove and the temperature sensor accommodation groove are respectively provided with a heating layer 31 and the temperature sensor 41; the insulating layer A3 and the heating layer 31 form a heating structure, and the temperature sensor 4 and the insulating layer B41 form a temperature detectio...

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Abstract

The invention discloses an MEMS micro heater with an integrated temperature sensor. The MEMS micro heater comprises a silicon substrate, an insulating and heat insulating layer, an insulating layer Band an insulating layer A, wherein the insulating and heat insulating layer, the insulating layer B and the insulating layer A are sequentially arranged on the silicon substrate and prepared through various MEMS processing processes; The insulating layer A is provided with a heating layer accommodating groove corresponding to the insulating layer B end plane, the insulating layer B is provided with a temperature sensor accommodating groove opposite to the insulating layer A end plane, and the heating layer accommodating groove and the temperature sensor accommodating groove are internally provided with a heating layer and a temperature sensor respectively; The insulating layer A and the heating layer form a heating structure, and the temperature sensor and the insulating layer B form a temperature detection structure.

Description

technical field [0001] The invention relates to sensor application technology, in particular to sensor application technology for gas detection, specifically, it shows a MEMS micro heater with an integrated temperature sensor. Background technique [0002] During the use of the micro-heater, different application scenarios require different working temperatures, so it is necessary to accurately monitor the temperature of the heater. [0003] At this stage, an infrared thermal imager is used to analyze the temperature of the micro-heater in the working state, but this method requires professional infrared thermal imager equipment, and the chip cannot be completely packaged; it is impossible to accurately measure the temperature state of the micro-heater, especially After the micro-heater is coated with a gas-sensitive material or a black-body infrared material and packaged, it is very difficult to measure the actual temperature of the micro-heater. [0004] Therefore, it is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/00G01K1/14
Inventor 吴勐褚旻李知兰张敏敏
Owner 翼捷安全设备(昆山)有限公司
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