MEMS micro-heater with an integrated temperature sensor

A temperature sensor and micro-heater technology, applied in the sensor application field, can solve the problems that the chip cannot be completely packaged, the temperature measurement of the micro-heater is difficult, and the temperature state of the micro-heater cannot be accurately measured. The effect of low power consumption and short response time
CN109809356AInactive Publication Date: 2019-05-28翼捷安全设备(昆山)有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
翼捷安全设备(昆山)有限公司
Publication Date
2019-05-28
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses an MEMS micro heater with an integrated temperature sensor. The MEMS micro heater comprises a silicon substrate, an insulating and heat insulating layer, an insulating layer Band an insulating layer A, wherein the insulating and heat insulating layer, the insulating layer B and the insulating layer A are sequentially arranged on the silicon substrate and prepared through various MEMS processing processes; The insulating layer A is provided with a heating layer accommodating groove corresponding to the insulating layer B end plane, the insulating layer B is provided with a temperature sensor accommodating groove opposite to the insulating layer A end plane, and the heating layer accommodating groove and the temperature sensor accommodating groove are internally provided with a heating layer and a temperature sensor respectively; The insulating layer A and the heating layer form a heating structure, and the temperature sensor and the insulating layer B form a temperature detection structure.
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Description

technical field

[0001] The invention relates to sensor application technology, in particular to sensor application technology for gas detection, specifically, it shows a MEMS micro heater with an integrated temperature sensor. Background technique

[0002] During the use of the micro-heater, different application scenarios require different working temperatures, so it is necessary to accurately monitor the temperature of the heater.

[0003] At this stage, an infrared thermal imager is used to analyze the temperature of the micro-heater in the working state, but this method requires professional infrared thermal imager equipment, and the chip cannot be completely packaged; it is impossible to accurately measure the temperature state of the micro-heater, especially After the micro-heater is coated with a gas-sensitive material or a black-body infrared material and packaged, it is very difficult to measure the actual temperature of the micro-heater.

[0004] Therefore, it is ...

Claims

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