Organic gas detection chip based on rhenium sulfide nanodevices
A technology of organic gas and nano-devices, which is applied in the field of detection, can solve the problems of complex detection methods, increase the difficulty of preparation, and large volume of detection instruments, and achieve the effects of convenient real-time monitoring, simple structure and preparation method, and high detection sensitivity
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[0045] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that: the following examples are illustrative, not restrictive, and the protection scope of the present invention cannot be limited by the following examples. The silicon wafer is a Prime-grade 4-inch single-side polished p-type silicon wafer provided by Suzhou Jingsi Electronic Technology Co., Ltd., with a crystal orientation of , a resistivity of 9-10Ω·cm, and a thickness of 500 μm.
[0046] see Figure 1 to Figure 3 Shown is a specific embodiment of an organic gas detection chip based on rhenium sulfide nano-devices of the present invention. It can be seen that the present invention includes rhenium sulfide nano-flakes 2, a first electrode 3, a second electrode 4 and a silicon dioxide substrate 1 The rhenium sulfide nanoflakes 2 are obtained by mechanical exfoliation, the length and width are in the order of micro...
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