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Device and method for detecting cleanliness and flatness of flat plate

A technology for detecting flat panels and cleanliness, applied in the field of inspection, can solve the problems such as the inability to greatly improve the product yield, the inability to improve the front-end process, and the inability to accurately determine the type of contamination in the detection method, so as to improve the LED pulse current. , easy to re-check, improve the effect of brightness

Pending Publication Date: 2019-06-21
武汉中导光电设备有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0002] In the flat plate manufacturing process, especially in the PI film process, if the impurities and dirt on it are not handled properly, it will have a major impact on the yield of subsequent products. Traditional detection methods cannot accurately determine the type of dirt. Therefore, it is impossible to make targeted improvements to the front-end process, so that the yield rate of the product cannot be greatly improved.

Method used

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  • Device and method for detecting cleanliness and flatness of flat plate
  • Device and method for detecting cleanliness and flatness of flat plate
  • Device and method for detecting cleanliness and flatness of flat plate

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Embodiment

[0039] This embodiment provides a device for detecting the cleanliness and flatness of a flat panel, such as figure 1 As shown, it is a diagram of the imaging system of the present invention, including an image acquisition device, a relay lens 3, a dichroic prism 5, an objective lens 7, an objective lens housing 12, a power supply device, a dark field lighting device 8 and a light source control device, and the image acquisition device includes The camera 1 and the imaging system 2, the relay lens 3 and the A end 4 of the dichroic prism are connected together through a sleeve tube, the B end 6 of the dichroic prism is connected with the objective lens through the objective lens housing 12, and the dark field illumination The device 8 is connected with the objective lens housing 6 , and the light source control device includes a coaxial light source 9 , a control button and an illumination lens group 10 . When there are impurities or dirt defects on the smooth substrate 16 to b...

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Abstract

The invention relates to the technical field of detection, in particular to a device and method for detecting the cleanliness and flatness of a flat plate, and the device comprises an image collectiondevice, a relay lens, a beam splitter prism, an objective lens, an objective lens jacket, a power supply device, a dark field lighting device, a coaxial lighting device and a light source control device. The invention provides a device capable of detecting the cleanliness and concave-convex points of flat glass, which can accurately distinguish defect types on a flat plate and is suitable for production detection.

Description

technical field [0001] The invention relates to the technical field of detection, in particular to a device and method for detecting the cleanliness and flatness of a flat plate. Background technique [0002] In the flat plate manufacturing process, especially in the PI film process, if the impurities and dirt on it are not handled properly, it will have a major impact on the yield of subsequent products. Traditional detection methods cannot accurately determine the type of dirt. Therefore, targeted improvements cannot be made to the front-end process, so that the yield rate of the product cannot be greatly improved. Contents of the invention [0003] In the existing flat glass production, especially in the PI film coating process, the surface bumps and convexities produced will have a fatal impact on the subsequent process. It is difficult for the existing detection technology to distinguish whether the surface defects are concave points, convex points or Dust or impurit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/94G01B11/30
Inventor 张冲赵润川李波曾耀
Owner 武汉中导光电设备有限公司
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