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Substrate vapor deposition alignment system and method and device for monitoring pixel position measurement

A pixel position and pixel technology, which is applied in the field of substrate evaporation alignment system and monitoring pixel position measurement, can solve the problems affecting the accuracy of OLED substrate evaporation alignment compensation amount and inaccurate monitoring pixel measurement, so as to improve the evaporation efficiency. Yield rate, improvement of measurement accuracy, and elimination of measurement deviation

Active Publication Date: 2021-05-04
BOE TECH GRP CO LTD +1
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Problems solved by technology

[0007] However, at present, there is a problem of inaccuracy in the position measurement of the monitoring pixel obtained by evaporation, and there is a deviation of about 1-2um, so this deviation affects the accuracy of determining the evaporation alignment compensation amount of the OLED substrate

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Embodiment Construction

[0034] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0035] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0036] Those skilled in the art will understand that unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. The expression "and / or" used herein includes all or any elements and all combinations of one or more associated lis...

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Abstract

The invention discloses a substrate evaporation alignment system and a method and device for measuring the position of monitoring pixels. The method includes: measuring the edge shadow and position of monitoring pixels obtained by evaporation on the substrate; Shadow, determining the edge climbing distance of the monitoring pixel; correcting the measured position data according to the edge climbing distance. The application of the present invention can improve the measurement accuracy of the monitoring pixel position, improve the accuracy of determining the vapor deposition alignment compensation amount of the OLED substrate, and thereby improve the vapor deposition yield of the OLED substrate.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a substrate evaporation alignment system and a method and device for monitoring pixel position measurement. Background technique [0002] An OLED display device includes a cathode layer, an organic material functional layer, an anode layer, etc., wherein the organic material functional layer is generally prepared by resistance heating evaporation method. During the evaporation process, the red pixel, the green pixel and the blue pixel need to be evaporated separately through an evaporation mask. [0003] In the evaporation alignment process of the OLED substrate, due to the difference between the manufacturing process deviation of the evaporation mask and the position deviation of the pixel holes on the OLED substrate, it is often necessary to perform a certain translation or rotation on the OLED substrate during the evaporation process, so that as much as possible The position...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/54C23C14/04C23C14/24
CPCC23C14/042C23C14/24C23C14/54
Inventor 谢飞吴建鹏安成国宋裕斌
Owner BOE TECH GRP CO LTD
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