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Conveying device and method for mask plate

A technology of handling device and mask plate, which is applied in transportation and packaging, vacuum evaporation coating, coating, etc., can solve problems such as adverse effects of CMMSheet flatness, and achieve improved evaporation yield, improved production efficiency, and high-efficiency pick-up The effect of handling

Active Publication Date: 2022-03-25
YUNGU GUAN TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the current CMM production process, the CMM Sheet (CMM sheet) is usually transported to the mask frame by means of vacuum adsorption, resulting in adverse effects on the flatness of the CMM Sheet

Method used

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  • Conveying device and method for mask plate
  • Conveying device and method for mask plate
  • Conveying device and method for mask plate

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Embodiment Construction

[0026] In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are part of the implementation of the present invention. examples, but not all examples. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention. The embodiments described below and features in the embodiments may be combined with each other without conflict.

[0027] In order to solve the technical problem of poor flatness of the CMM Sheet caused by the existing mask production method, an embodiment of the present invention provides a mask conveying device, the conveying device includes a contact plate, a magnet...

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Abstract

The invention relates to the technical field of mask plate production, and discloses a mask plate conveying device and a conveying method. The handling device includes a contact plate, a magnetic part and a supporting column, the contact plate and the magnetic part are arranged oppositely, the contact plate includes a bonding surface for bonding the mask plate, and the supporting column connects the contact plate and the magnetic part so that the bonding surface is located within the magnetic field formed by the magnetic part. Through the above method, the present invention can ensure sufficient flatness of the mask plate.

Description

technical field [0001] The invention relates to the technical field of mask plate production, in particular to a conveying device and a conveying method for a mask plate. Background technique [0002] CMM (Common Metal Mask), also known as common metal mask, is mainly used in the evaporation process of common film layers (such as organic layers or metal layers, etc.) in the device structure. Its function is to limit the evaporation of organic materials or metal materials. Plated in place of a valid glass substrate. [0003] In the current CMM production process, the CMM Sheet (CMM sheet) is usually transported to the mask frame by vacuum adsorption, which causes the flatness of the CMM Sheet to be adversely affected. SUMMARY OF THE INVENTION [0004] In view of this, the main technical problem to be solved by the present invention is to provide a conveying device and a conveying method for a mask plate, which can ensure that the mask plate has sufficient flatness. [000...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677H01L21/683C23C14/04
CPCH01L21/67709H01L21/677H01L21/6838C23C14/042
Inventor 齐英旭卓林海李伟丽王亚甘帅燕
Owner YUNGU GUAN TECH CO LTD
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