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Mask carrying device and method

A technology of handling device and mask plate, applied in the directions of transportation and packaging, ion implantation plating, coating, etc., can solve problems such as the adverse effect of CMMSheet flatness, and achieve higher evaporation yield, efficient picking and handling, and improved production. The effect of efficiency

Active Publication Date: 2019-08-23
YUNGU GUAN TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In the current CMM production process, the CMM Sheet (CMM sheet) is usually transported to the mask frame by means of vacuum adsorption, resulting in adverse effects on the flatness of the CMM Sheet

Method used

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  • Mask carrying device and method
  • Mask carrying device and method
  • Mask carrying device and method

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Embodiment Construction

[0026] In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are part of the implementation of the present invention. example, not all examples. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention. In the case of no conflict, the following embodiments and features in the embodiments can be combined with each other.

[0027] In order to solve the technical problem of poor flatness of the CMM Sheet caused by the existing mask production method, an embodiment of the present invention provides a mask handling device, the handling device includes a contact plate, a magneti...

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Abstract

The invention relates to the technical field of mask production and discloses a mask carrying device and method. The device includes a contact plate, a magnetic portion and a support column, wherein the contact plate is arranged opposite to the magnetic portion, the contact plate includes a bonding surface for bonding a mask, and the support column is connected with the contact plate and the magnetic portion such that the bonding surface is located within a magnetic field formed by the magnetic portion. The device is advantaged in that enough flatness of the mask can be guaranteed.

Description

technical field [0001] The invention relates to the technical field of mask plate production, in particular to a mask plate conveying device and a conveying method. Background technique [0002] CMM (Common Metal Mask), also known as a common metal mask, is mainly used in the evaporation process of a common film layer (such as an organic layer or a metal layer, etc.) in a device structure. Its function is to limit the evaporation of organic materials or metal materials. plated in place of the effective glass substrate. [0003] However, in the current CMM production process, the CMM Sheet (CMM sheet) is usually transported to the mask frame by means of vacuum adsorption, resulting in adverse effects on the flatness of the CMM Sheet. Contents of the invention [0004] In view of this, the main technical problem to be solved by the present invention is to provide a conveying device and a conveying method for a mask plate, which can ensure sufficient flatness of the mask pla...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677H01L21/683C23C14/04
CPCH01L21/67709H01L21/677H01L21/6838C23C14/042
Inventor 齐英旭卓林海李伟丽王亚甘帅燕
Owner YUNGU GUAN TECH CO LTD
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