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Mask, mask assembly and mask manufacturing method

A manufacturing method and mask technology, which can be used in semiconductor/solid-state device manufacturing, electrical components, electrical solid-state devices, etc., and can solve problems such as color mixing of display panels

Active Publication Date: 2020-06-23
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Based on this, the present invention provides a mask plate, which solves the problem that the formed display panel is prone to color mixing, and improves the evaporation yield

Method used

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  • Mask, mask assembly and mask manufacturing method
  • Mask, mask assembly and mask manufacturing method
  • Mask, mask assembly and mask manufacturing method

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Embodiment Construction

[0043] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the associated drawings. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0044] It should be noted that when an element is referred to as being “fixed” to another element, it can be directly on the other element or there can also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present.

[0045] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as...

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Abstract

The invention relates to a mask plate, a mask assembly and a method for making the mask plate. The mask plate includes a mask substrate and a shielding layer. An evaporation area is arranged on the mask substrate. The evaporation area includes an effective evaporation area and an effective evaporation area. The invalid evaporation area, the effective evaporation area corresponds to the display area of ​​the display panel, the invalid evaporation area corresponds to at least the slotted area of ​​the display panel, and multiple evaporation openings are distributed in the effective evaporation area and the invalid evaporation area The shielding layer is arranged on the surface of the mask substrate and shields the evaporation opening in the invalid evaporation area. The above-mentioned mask plate is used for the evaporation display panel. For the mask substrate, not only the effective evaporation area corresponds to the display area of ​​the special-shaped screen, but also the gap outside the effective evaporation is filled by the invalid evaporation area. The edge of the evaporation area is evenly stressed, which can prevent the mask substrate from wrinkling when stretching the net, thereby preventing color mixing of the final formed display panel and improving product yield.

Description

technical field [0001] The invention relates to the technical field of display panel preparation, in particular to a mask plate, a mask component and a mask plate manufacturing method. Background technique [0002] Currently, OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) adopts a vacuum evaporation technology to prepare an organic light-emitting layer. In the device preparation process, organic materials are deposited on the substrate above the evaporation source by high-temperature evaporation. In order to evaporate organic materials to specific positions according to the design, a high-precision metal mask is required. The mask ( That is, a pre-designed effective opening area is left on the high-precision metal mask plate, through which the organic material is deposited on the back plate to form a preset pattern. [0003] As slotted special-shaped display panels gradually occupy the mainstream market, the demand for corresponding special-shaped screens...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/12C23C14/24H01L51/56
CPCC23C14/042C23C14/12C23C14/24H10K71/00
Inventor 周丽芳刘明星王徐亮
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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