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Mask plate, mask assembly and mask plate manufacturing method

A manufacturing method and a technology of a mask plate, which are applied in semiconductor/solid-state device manufacturing, electrical components, electric solid-state devices, etc., and can solve problems such as color mixing of display panels

Active Publication Date: 2018-10-12
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Based on this, the present invention provides a mask plate, which solves the problem that the formed display panel is prone to color mixing, and improves the evaporation yield

Method used

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  • Mask plate, mask assembly and mask plate manufacturing method
  • Mask plate, mask assembly and mask plate manufacturing method
  • Mask plate, mask assembly and mask plate manufacturing method

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Embodiment Construction

[0043] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the associated drawings. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0044] It should be noted that when an element is referred to as being “fixed” to another element, it can be directly on the other element or there can also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present.

[0045] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as...

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Abstract

The invention relates to a mask plate, a mask assembly and a mask plate manufacturing method. The mask plate comprises a mask base plate and a shielding layer, the mask base plate is provided with anevaporation zone, the evaporation zone comprises an effective evaporation zone part and an ineffective evaporation zone part, the effective evaporation zone part corresponds to a display zone of a display panel, the ineffective evaporation zone part at least corresponds to a slotting zone of the display panel, the effective evaporation zone part and the ineffective evaporation zone part are each provided with a plurality of evaporation openings evenly, and the shielding layer is arranged on the surface of the mask base plate and shields the evaporation openings in the ineffective evaporation zone part. The mask plate is used for evaporation of the display panel, as for the mask base plate, the effective evaporation zone part corresponds to the display zone of a special-shaped screen, the ineffective evaporation zone part is used for supplementing notches outside the effective evaporation zone part, the edge of the overall evaporation zone is even in stress, folds of the mask base plateduring net stretching can be prevented, color mixing of the finally-molded display panel is further prevented, and the product yield is improved.

Description

technical field [0001] The invention relates to the technical field of display panel preparation, in particular to a mask plate, a mask component and a mask plate manufacturing method. Background technique [0002] Currently, OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) adopts a vacuum evaporation technology to prepare an organic light-emitting layer. In the device preparation process, organic materials are deposited on the substrate above the evaporation source by high-temperature evaporation. In order to evaporate organic materials to specific positions according to the design, a high-precision metal mask is required. The mask ( That is, a pre-designed effective opening area is left on the high-precision metal mask plate, through which the organic material is deposited on the back plate to form a preset pattern. [0003] As slotted special-shaped display panels gradually occupy the mainstream market, the demand for corresponding special-shaped screens...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/12C23C14/24H01L51/56
CPCC23C14/042C23C14/12C23C14/24H10K71/00
Inventor 周丽芳刘明星王徐亮
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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