An Infrared Gas Sensor Based on Infrared Emission and Detection Integrated Chip
A gas sensor and infrared emission technology, which is applied in the field of gas sensing, can solve the problems of complex structure, difficult integration, and large loss of light energy of infrared gas sensors, and achieves low manufacturing cost, simple and compact structure, and small loss of light energy. Effect
Active Publication Date: 2022-01-07
EZHOU INST OF IND TECH HUAZHONG UNIV OF SCI & TECH +1
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[0003] The purpose of the present invention is to provide an infrared gas sensor based on an infrared emission and detection integrated chip to solve the problems of complex structure, difficult integration, large loss of light energy and high cost in the prior art.
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[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0021] see figure 1 and figure 2 , figure 1 It is a schematic top view of the internal structure of the first embodiment of the infrared gas sensor based on the infrared emission and detection integrated chip in the present invention, figure 2 It is a schematic diagram of the overall structure of the first embodiment of an infrared gas sensor based on an infrared emission and detection integrated chip in the present invention, wherein 101 is a substrate, 1...
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The invention discloses an infrared gas sensor based on an infrared emitting and detecting integrated chip, comprising a substrate, a cover plate, an infrared emitting and detecting integrated chip and a cavity; the substrate is arranged parallel to the cover plate, and the cavity is arranged Between the substrate and the cover plate, the infrared emission and detection integrated chip is arranged on the substrate and located in the cavity; the surface of the cavity is provided with an infrared reflection film, so that the After one side of the infrared emission and detection integrated chip emits infrared radiation, it is reflected and propagated by the cavity, and the other side of the infrared emission and detection integrated chip detects the infrared radiation. The invention adopts the infrared emission and detection integrated chip with a specific structure and an independent cavity structure, so that the sensor structure is simple and compact, the loss of light energy is small, and the manufacturing cost is lower.
Description
technical field [0001] The invention relates to the technical field of gas sensing, in particular to an infrared gas sensor based on an infrared emitting and detecting integrated chip. Background technique [0002] Infrared gas sensor is a gas sensing device based on the selective absorption characteristics of near-infrared spectra of different gas molecules, using the relationship between gas concentration and absorption intensity to identify gas components and determine their concentration. At present, traditional infrared gas sensors are composed of separate components such as infrared light emitting source, narrow-band filter, gas chamber and infrared light detector, which makes it difficult to reduce the thickness and miniaturization of the sensor, and it is also difficult to reduce power consumption and cost. It brings difficulties to the application of portable smart gas measurement systems such as smartphones. Using micro-nano-processing batch processing technology ...
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IPC IPC(8): G01N21/3518G01N21/359
CPCG01N21/3518G01N21/359
Inventor 赖建军
Owner EZHOU INST OF IND TECH HUAZHONG UNIV OF SCI & TECH