A kind of hoisting device for wafer box
A hoisting device and wafer cassette technology, applied in the directions of transportation and packaging, loading and hanging components, etc., can solve the problem that the grasping components cannot be aligned with the wafer cassette, the wafer cassette cannot be smoothly grasped, and the unmanned vehicle is abnormal. and other problems to achieve the effect of improving safety and reliability, ensuring success rate, and preventing falling
Active Publication Date: 2020-06-05
芯导精密(北京)设备有限公司
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Problems solved by technology
[0003] However, when the wafer box is in a non-horizontal state, or when the parts of the lifting device used to grab the wafer box shake, it often causes abnormalities in the unmanned van
The reason is that there is misalignment between the gripping part and the wafer cassette, and the swing of the suspension element usually causes position deviation, and the gripping part is usually a rigid element that cannot self-adjust with the wafer cassette. In addition, the suspension element uses After a period of time, the grabbing part may be in a non-horizontal state due to elastic fatigue, which will also result in the failure to grab the wafer box smoothly
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[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0023] It is to be understood that the terms "front", "rear", "left", "right", "upper", "lower", "top", "bottom", "inner", "outer" etc. indicate an orientation or The positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific o...
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The invention discloses a wafer box lifting device. The wafer box lifting device comprises a fixed plate, and a movable plate positioned on the lower side of the fixed plate; the movable plate is connected with the movable plate through multiple flexible ropes; the movable plate is in a horizontal state when the flexible ropes are naturally vertical; grabbing parts are arranged on two sides of themovable plate, and are connected with moving mechanisms; and the grabbing parts are driven by the moving mechanisms to move in the same or opposite directions. The wafer box lifting device can accurately lift up wafer boxes in a non-horizontal state, and can prevent lock rods from moving to the outer side by using self weights of the wafer boxes, the movable plate and the grabbing parts to prevent fall of the wafer boxes in the lifting transportation process so as to improve the device safety and reliability.
Description
technical field [0001] The invention relates to the technical field of lifting devices, in particular to a lifting device for a wafer box. Background technique [0002] Traditional semiconductor fabs use carts to carry wafer boxes manually. As the size of wafers increases, the weight of wafers plus wafer boxes has exceeded the level that can be handled by humans. Today's semiconductor fabs are usually A suspension type hoist device (Suspension type hoist device) and an unmanned transport vehicle (Overhead hoist transfer, OHT) are used to transport the wafer cassette. The lifting device can vertically lift the wafer box (FOUP) from the loading end (Loadport) of a process machine through the suspension element (such as a timing belt), and the unmanned van can move the wafer box (FOUP) along the track set on the ceiling The wafer cassette is transferred to the loading end of another process tool. [0003] However, when the wafer box is in a non-horizontal state, or when the p...
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IPC IPC(8): B66C1/12B66C1/28
CPCB66C1/12B66C1/28
Inventor 张庆钊陈百捷姚广军王镇清
Owner 芯导精密(北京)设备有限公司