Positioning device for scanning electron microscope sample

Abstract

The invention provides a positioning device for a scanning electron microscope sample. The positioning device comprises a T-shaped platform and a sample frame matchingly inserted with the T-shaped platform, the T-shaped platform comprises a plane support piece and a first cylinder, the upper surface of the plane support piece is polygonal, the top end of the firs cylinder is connected with the bottom portion of the plane support piece, the first cylinder is configured to support the plane support piece, and the upper surface of the plane support piece is used to place samples; the upper surface of the sample frame is provided with a plurality of polygonal grooves for inserting the plane support piece, the center of each groove is provided with a first post hole matched with the first cylinder, the first post holes are used to insert the first cylinder of the T-shaped platform, the plane support piece is included in the grooves, at least one edge and at least one vertex in the plane support piece are abutted against with the polygonal grooves, and the number of the vertexes of the plane support piece is smaller than or equal to the number of the vertexes of the grooves. The positioning device for a scanning electron microscope sample can perform restoring and positioning for the T-shaped platform on which samples are put to achieve the repeated observation of the same visual field.

Description

technical field [0001] The invention relates to the technical field of experimental instruments and equipment, in particular to a positioning device for scanning electron microscope samples. Background technique [0002] With the development of microscopic observation technology, scanning electron microscopy is widely used in various fields, and there is an increasing demand for micron-nano-scale observations on a centimeter or millimeter-scale sample, and for the same field of view of the same sample There is also an increasing need to do repeated observations. [0003] In the prior art, the scanning electron microscope sample is not directly placed on the electron microscope sample stage, but is fixed together with the electron microscope sample stage with the assistance of the T-shaped stage and the sample holder. Specifically, the sample is fixed to the surface of the T-shaped stage by special tape or glue, the T-shaped stage is placed on the sample holder, and the bott...

AI Technical Summary

Problems solved by technology

[0004] Since the T-shaped stage pasted with samples in the prior art is removed from the sample holder, it is difficult to accurately restore the angle and position with the sample holder, and it is impossible to observe the same field of view, and then the experiment cannot be carried out. , resulting in a slow progress of the experiment

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