PL detector and detection method
A detection machine and frame technology, which is applied in the direction of semiconductor/solid-state device testing/measurement, conveyor objects, electrical components, etc., can solve the problems of poor working stability and easy vibration of the silicon wafer retrieving mechanism, and achieve detection interference , reliable delivery, reliable detection and accurate results
Pending Publication Date: 2019-09-10
广州蓝海智能装备有限公司
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Problems solved by technology
Although this can achieve better retrieving and unloading, the slide plate is prone to vibration during repeated movements, so the working stability of the silicon wafer retrieving mechanism is poor.
Method used
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[0049] The present invention will be further described in detail below with reference to the drawings and specific embodiments.
[0050] Such as figure 1 As shown, the photovoltaic solar cell PL detector includes a frame 9, a detection and conveying device 1, an automatic picking and unloading device 3, a conveying device 4, a lifting device 5, and a traversing device 7. The lifting device 5 is installed at the loading end and the unloading end of the frame 9 respectively, the detection and conveying device 1 is installed in the middle of the frame 9, and the automatic picking and unloading device 3 is installed at the loading end of the frame 9. The unloading end of the rack is provided with more than two automatic picking and unloading devices 3 side by side. In this embodiment, two automatic picking and unloading devices 3 are arranged side by side at the unloading end of the rack. A conveying device 4 is provided between the automatic picking and unloading device 3 and the de...
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The invention relates to a PL detector and a detection method. The PL detector comprises a rack, a detection transmission device, automatic taking and discharging devices, transmission devices, lifting devices and a horizontal moving device, wherein the detection transmission device comprises a detection transmission rack, a detection transmission driving mechanism and a detection device, the lifting devices are respectively arranged at a loading end and an unloading end of the rack, the detection transmission device is arranged at a middle part of the rack, the automatic taking and discharging devices are arranged at the loading end of the rack, more than two automatic taking and discharging devices are arranged at the unloading end of the rack in parallel, the transmission devices are arranged between the automatic taking and discharging devices at the loading end and the detection transmission device, the transmission devices are arranged between the detection transmission device and the automatic taking and discharging device, and the horizontal moving device is arranged above the automatic taking and discharging devices at the unloading end. The detection method comprises thestep of performing automatic and continuous detection on the PL detector. The PL detector is reasonable in structure, fast in taking and discharging speed, high in detection accuracy and good in detection reliability.
Description
Technical field [0001] The invention relates to the detection of solar cells, in particular to a photovoltaic solar cell PL detector. Background technique [0002] The quality of the silicon wafer is very important to the electrical performance of the solar cell, or the quality of the original silicon wafer directly determines the electrical performance of the solar cell. Moreover, as the price of silicon materials and silicon wafers decreases, the proportion of operating costs of the cell processing technology increases, and the inspection requirements for original silicon wafers are getting higher and higher. [0003] Existing original silicon wafer inspection equipment can only detect defects such as silicon wafer dimensions and edges, while new equipment can detect resistivity, dislocations, cracks, impurities, and minority lifetimes, which can more accurately reflect the original The performance of silicon wafers. [0004] In order to solve the above technical problems, a devi...
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IPC IPC(8): H01L21/66H01L21/677
CPCH01L22/12H01L22/20H01L21/67703H01L21/67706H01L21/67718
Inventor 徐文斌黄荣杰刘宇昆李宝玉
Owner 广州蓝海智能装备有限公司