Micro-vibration actuating vacuum suction pen

Abstract

The invention discloses a micro-vibration actuating vacuum suction pen, which comprises a gas compression cavity, an intermediate valve type micro-vibration bodies, an upper end cover, a sealing ring,an intermediate ring, a wire guide hole sealing plug, a sucker seat, a sucker, a gas inlet and a gas outlet, wherein one end of the intermediate ring is hermetically connected with the sucker seat, the other end of the intermediate is hermetically connected with the upper end cover, and the intermediate valve type micro-vibration bodies are respectively arranged at two ends of the intermediate ring. The intermediate valve type micro-vibration bodies generate a pressure difference between the gas compression cavity and the outside through self deformation, and drive a gas to flow into the gascompression cavity from the gas inlet and then be discharged from the gas outlet. The micro-vibration actuating vacuum suction pen integrates a gas compression pump and a material pickup mechanism into a whole, has the advantages of compact structure, simple control and high response speed, can adsorb light and thin micro devices and is widely applied to the fields of microelectronics, computers,biomedicine and micro-nano manufacturing and the like.

Description

technical field [0001] The invention relates to the field of vacuum adsorption pick-up devices for tiny devices, in particular to a micro-vibration actuated vacuum suction pen. Background technique [0002] In recent years, with the rapid development of science and technology, electromechanical products have been constantly updated and developed in the direction of intelligence and miniaturization. During the assembly process of MEMS products, it is necessary to pick up a large number of thin and fragile devices, such as chips, ceramic wafers and silicon wafers. The vacuum negative pressure pick-up device plays an important role in the pick-up process of such devices. It has the advantages of simple structure, easy control of pick-up force and less damage to the device. It is suitable for absorbing fragile, soft, thin and spherical objects. The vacuum negative pressure is the power source of the negative pressure pickup device, and the vacuum generator is a vacuum negative ...

AI Technical Summary

Problems solved by technology

[0004] 1. The adsorption force of the negative pressure pick-up structure fluctuates greatly, making it easy to drop the picked-up materials;

[0005] 2. The control accuracy of the negative pressure pickup force is poor, and it is easy to damage some light and fragile materials due to excessive adsorption force;

[0006] 3. The conversion efficiency of positive pressure into negative pressure by vacuum generator is low and the noise is large

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