High-precision Z-direction single-degree-of-freedom micro-positioning platform based on honeycomb structure hinge

Abstract

The invention discloses a high-precision Z-direction single-degree-of-freedom micro-positioning platform based on a honeycomb structure hinge. The platform comprises a honeycomb structure hinge supporting ring, a base and a piezoelectric ceramic driver; the honeycomb structure hinge supporting ring comprises an outer ring on the periphery of the ring, a terminal platform located in the center of the ring and the honeycomb structure hinge arranged between the outer ring and the terminal platform, and the honeycomb structure hinge is of a honeycomb-shaped structure composed of regular hexagons;the outer ring is fixedly connected to the base; the piezoelectric ceramic driver is fixedly connected into the base, the center of the bottom of the terminal platform is in contact with the top of the piezoelectric ceramic driver, and the piezoelectric ceramic driver generates Z-direction displacement to drive the terminal platform to generate Z-direction displacement. By adopting the honeycomb structure hinge which is composed of the regular hexagons and designed on the basis of the bionics principle, the platform has the advantages of being high in rigidity, good in symmetry and compact instructure, and high-precision and high-bandwidth movement and positioning of the terminal platform in the Z direction can be achieved.

Description

technical field [0001] The invention relates to a micro-positioning platform, in particular to a high-precision Z-direction single-degree-of-freedom micro-positioning platform based on a honeycomb structure hinge. Background technique [0002] With the development of science and technology, micro-nano technology has been widely used. However, the high-precision micro-positioning platform has always restricted the promotion of micro-nano technology. At present, a major breakthrough has been made in the low-stiffness Z-direction single-degree-of-freedom micro-positioning platform, but the high-precision Z-direction single-degree-of-freedom micro-positioning platform with high stiffness still needs to be further improved. Contents of the invention [0003] The purpose of the present invention is to overcome the deficiencies in the prior art and provide a high-precision Z-direction single-degree-of-freedom micro-positioning platform based on a honeycomb structure hinge. The p...

AI Technical Summary

Problems solved by technology

However, the high-precision micro-positioning platform has always restricted the promotion of micro-nano technology

At present, a major breakthrough has been made in the Z-direction single-degree-of-freedom micro-positioning platform with low stiffness. However, the high-precision Z-direction single-degree-of-freedom micro-positioning platform with high stiffness still needs to be further improved.

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