Gas transmission system and gas transmission method

A technology of gas transmission and gas, which is applied in gas/liquid distribution and storage, pipeline system, container filling method, etc., and can solve problems such as the limitation of supply gas usage

Inactive Publication Date: 2020-01-07
涂宏彬
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, it is designed for low-volatility vapor compression process gases, such as SiH2Cl2, WF6, HF, Cl2, Si2H6, etc., because the pressure regulating

Method used

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  • Gas transmission system and gas transmission method

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Embodiment Construction

[0037] In order to make the purpose, features and advantages of the present invention more comprehensible, several preferred embodiments are specifically cited below, together with the accompanying drawings, which are described in detail as follows.

[0038] figure 1 A schematic representation of an implementation of a gas delivery system according to the invention is shown. The gas transmission system 100 mainly includes: a gas cylinder 10 ; an electronic mass flow controller 20 ; an electronic mass flow meter 30 and a controller 40 .

[0039] The electronic mass flow controller 20 is connected to the gas cylinder 10 and is used to control a gas output in the gas cylinder 10 . The gas cylinder 10 contains a liquid precursor or a gas precursor. In one embodiment, the gas cylinder 10 contains low-volatility vapor pressure process gas, such as SiH2Cl2, WF6, HF, Cl2, Si2H6, and the like. A typical mass flow controller 20 is controlled by a valve (valve), which can be manually ...

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PUM

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Abstract

The invention provides a gas transmission system and a gas transmission method. The gas transmission system primarily comprises a gas cylinder, an electronic mass flow controller, an electronic mass flowmeter and a controller, wherein the electronic mass flow controller is connected to the gas cylinder for controlling a gas output amount in the gas cylinder; the electronic mass flowmeter is connected to the electronic mass flow controller through a pipeline for sensing a gas usage amount at a final outlet of the gas transmission system; and the controller is electrically connected to the electronic mass flow controller and the electronic mass flowmeter for adjusting the gas output amount of the electronic mass flow controller. The gas transmission system and the gas transmission method canimprove the output amount of medium- and low-volatile vapor pressure process gas in the gas cylinder effectively.

Description

technical field [0001] The present invention relates to a gas transmission system and method, in particular to a gas transmission system and method using an electronic mass flow controller and an electronic mass flow meter, which can effectively improve the low-volatility vapor compression process in gas cylinders gas output. Background technique [0002] In the semiconductor process (process), most processes require the supply of various gases, so in the semiconductor process equipment, gas delivery equipment is required to transport the required process gases (processing gases). Traditional semiconductor gas supply equipment uses a typical gas cabinet (gas cabinet), the internal design of which is a steel cylinder combined with a variety of control valves, including manual valves, pneumatic valves, and pressure regulators. The flow and pressure control of gas delivery is completed, and the relevant process gas is delivered to the end-of-use machine through the distributio...

Claims

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Application Information

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IPC IPC(8): F17C13/00F17C13/02F17C13/04F17D1/02F17D1/075F17D3/01F17D3/18
CPCF17C13/00F17C13/002F17C13/02F17C13/025F17C13/04F17C2205/0323F17D1/02F17D1/075F17D3/01F17D3/18
Inventor 涂宏彬
Owner 涂宏彬
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