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Electrostatic chuck unit

An electrostatic chuck, electrostatic force technology, applied in electrical components, circuits, holding devices using electrostatic attraction, etc., can solve problems such as difficult light emission

Pending Publication Date: 2020-01-14
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since it is difficult to obtain high-efficiency light emission with the above structure, an electron injection layer, an electron transport layer, a hole transport layer, and a hole injection layer are selectively added to the emissive layer as a layer between two electrodes (ie, anode and cathode). middle layer

Method used

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  • Electrostatic chuck unit
  • Electrostatic chuck unit
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Embodiment Construction

[0039] Since the present disclosure allows for various changes and many embodiments, specific embodiments will be illustrated in the drawings and described in detail in the written description. Features and effects of the present disclosure and a method of implementing the present disclosure can be more easily understood by referring to the accompanying drawings and the following detailed description of the preferred embodiments. However, this invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

[0040] Reference will now be made in detail to the embodiments, examples of which are illustrated in the drawings, in which the same or corresponding parts are given the same reference numerals regardless of figure numbers, and redundant explanations are omitted.

[0041] Throughout the specification, terms such as "first", "second", etc. may not be used for limiting purposes, but may be used to distinguish one ...

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Abstract

The present invention provides an electrostatic chuck unit. The electrostatic chuck unit includes a first wiring portion configured to generate a relatively weak electrostatic force and a second wiring portion configured to generate a relatively strong electrostatic force.

Description

[0001] Cross References to Related Applications [0002] This application claims priority and benefit from Korean Patent Application No. 10-2018-0077892 filed with the Korean Intellectual Property Office on July 4, 2018, the disclosure of which is incorporated herein by reference in its entirety. technical field [0003] One or more embodiments relate to a thin film deposition apparatus for generating vapor of a deposition source and for forming a thin film on a substrate through a mask, and also to a thin film deposition apparatus including an improved electrostatic chuck unit, wherein the electrostatic The chuck unit is used to bring the mask and the substrate into close contact with each other and to support the mask and the substrate. Background technique [0004] Generally, an organic light emitting display device generates an image by emitting light according to recombination in an emission layer of holes and electrons respectively injected into an anode and a cathode....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/683H01L51/56
CPCH01L21/6833H10K59/12H01L21/6831H01L21/68785H01L21/67109H01L21/67092C23C14/042C23C14/24C23C14/541C23C14/50H10K71/166H02N13/00B23Q3/15H01L21/67017C23C16/44H10K71/00H10K59/1201
Inventor 高晙赫金义圭宋珉澈孔炳翼文在晳闵秀玹李丞赈洪承柱
Owner SAMSUNG DISPLAY CO LTD