A self-aspirating X-ray generating device and use thereof

Abstract

The invention discloses a self-absorbing X-ray generating device and its application. The device comprises an insulating case, a cathode, an anode and a grid, at least one adsorption metal plate and at least one sputtering metal plate; the cathode is packaged in the insulating case Inside, used to release electrons; the anode is packaged in the insulating shell, the anode includes the target body and the target surface, and the electrons released by the cathode collide with the target surface to release X-rays; the adsorption metal plate and the sputtering metal plate are arranged in parallel to absorb the metal The plate and its adjacent sputtering metal plates form a set of ion sputtering structures, the number of ion sputtering structures is at least one set, the ion sputtering structures are located on at least one side of the cathode, and the adsorption metal plate and the sputtering metal plate The plane direction is parallel to the direction in which the cathode releases electrons; the grid can be arranged on the adsorption metal plate or the sputtering metal plate or separately. The invention introduces an ion sputtering structure to realize the adsorption of residual gas molecules in the tube while the X-ray tube emits, and obtains a better vacuum degree.

Description

technical field [0001] The invention is used in the technical field of X-rays, and relates to a self-inhalation X-ray generating device and its application, which can effectively improve the vacuum degree of vacuum electronic devices. Background technique [0002] Since its discovery, X-rays have been widely used in medical imaging, industrial inspection, material analysis, security inspection and other fields, and play a huge role in daily life and industrial production. Although there are many ways to obtain X-rays, the most important form of application is to accelerate the electron beam bombardment of the anode target in a vacuum environment. In this process, the electron beam needs to fly a certain distance in vacuum, so as to realize the emission, focusing, acceleration, and other beam shape processing of the electron beam. Since the anode high voltage of the X-ray tube is generally between tens and hundreds of kilovolts, the electrical insulation between the anode an...

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Problems solved by technology

However, the above two methods have certain disadvantages: the getter has an adsorption effect on gas molecules with high chemical activity, but has no adsorption capacity for inert gases such as helium (He) and argon (Ar), and there are powder falling and occasional outgassing and other disadvantages; the vacuum exhaust device in the open structure increases the volume and design complexity of the ray tube, and is easy to introduce mechanical vibration, which affects the imaging effect of the ray tube and increases the manufacturing cost of the ray tube

[0005] From the above description, it can be seen that in terms of maintaining the vacuum inside the X-ray tube, no matter whether the getter or the vacuum exhaust device is used, there are certain disadvantages.

And in recent years, with the emergence of cold-cathode X-ray tubes, higher requirements have been put forward for its internal vacuum, which makes the vacuum maintenance of X-ray tubes face more challenges.

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