System and method for rapid characterization of two-dimensional material morphology based on color camera

Abstract

The invention relates to a color camera-based rapid characterization system and method for two-dimensional material morphology, including a three-color light source module, a beam splitter, a measurement optical path, a color imaging module, and a data processing module, wherein: the three-color light source module is used for The illumination of the whole system; the beam splitter is used to divide the illumination beam generated by the three-color light source module into two beams, which are the measurement beam and the reference beam respectively; the color imaging module controls the on-off of the light path in time-sharing, and uses a color camera to treat the measurement beam separately. The sample and the standard sample are imaged; the light intensity images of the two imaging times are read out according to the three channels of red, green, and blue on the photosensitive panel, and the microscopic light intensity images of the sample under the three-color light are obtained; the data processing module uses The calculation method of differential reflection can obtain the microscopic differential reflection signal corresponding to the measured sample under red light, green light and blue light; the thickness of the measured two-dimensional material of each pixel can be obtained by using the method of model inversion and data fitting, combined with The pixel arrangement completes the characterization of the morphology of two-dimensional materials.

Description

technical field [0001] The invention relates to the technical field of optical in-situ rapid characterization of two-dimensional materials and the technical field of nanostructure testing, in particular to a measurement method for rapid characterization of two-dimensional material morphology based on a color camera. Background technique [0002] Two-dimensional materials are currently a hot research direction, and the research on their characterization methods is the basis of all other research. Two-dimensional materials appear to be non-nano-sized in only two directions, but nano-sized in thickness. It has unique properties and many excellent properties, so its research is of great significance. In order to better study two-dimensional materials, it is first necessary to improve the characterization methods. [0003] At present, the method for characterizing the morphology of two-dimensional materials is mainly AFM (atomic force microscopy), which is relatively expensive ...

AI Technical Summary

Problems solved by technology

[0004] The incident light of the currently used micro-differential reflectance spectrum is generally monochromatic light, which requires a series of scanning spectral operations to complete the measurement of the entire differential reflectance spectrum line, and the speed is relatively slow.

The monochrome camera used at the same time does not have the ability to distinguish different wavelengths

On the other hand, if the measurement method of reflectance spectrum is only used, the lateral resolution of two-dimensional materials cannot be achieved, and it is difficult to accurately characterize the thickness of the nanometer scale.

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