A device and method for testing the diffraction efficiency of a micro-nano-structured lens
A technology of micro-nano structure and diffraction efficiency, which is applied in the field of optical measurement, can solve problems such as inaccurate diffraction efficiency, inconsistent micro-nano structure appearance, and uneven distribution of processing errors, so as to realize automatic and efficient testing, expand testing capabilities, and improve The effect of test accuracy
Active Publication Date: 2022-04-19
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology
[0008] Traditional test methods only consider the diffraction efficiency in a single local range
For large-aperture micro-nano structure lenses, the morphology of micro-nano structures in different regions is inconsistent, and the distribution of processing errors is not uniform. Therefore, the diffraction efficiency is not a spatial invariant. Using the test results of local areas to characterize the diffraction efficiency of micro-nano structure lenses is not precise
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[0029] see figure 1 , the present invention provides a high-efficiency test device for the diffraction efficiency of a micro-nano structure lens, including a light source system 1, a beam expander collimation system 7, a beam splitting unit 9, a two-dimensional motion mechanism 2, a reference detection system 3, and a test detection system 10 , control and data processing computer 5; beam expansion and collimation system 7 is arranged on the outgoing optical path of light source system 1, and the light beam output by the optical fiber is collimated; It is a reference beam and a test beam; the reference beam directly enters the reference detection system 3, and the test beam is incident on the micro-nano structure lens 4 to be tested; the test detection system 10 is arranged on the focal plane of a specific diffraction order of the micro-nano structure lens 4; the main control The system and the data processing system are all integrated in the computer 5, using software; the ir...
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The invention provides a device and method for testing the diffraction efficiency of a micro-nano structure lens, comprising: a laser beam passes through a beam expanding collimation system to form a parallel beam; a beam splitting unit divides the parallel beam into two beams, one beam enters the reference detection system, The micro-nano structure lens to be tested is vertically incident; the test detection system is set at the focal plane of the lens to be tested to collect diffracted light energy; in order to improve the measurement accuracy, a dual optical path method is adopted, and the light energy of the test beam is corrected in real time by using the signal collected by the reference detection system , to suppress the influence of light source power fluctuations. The beam expansion collimation system and the beam splitting unit are integrated on the optical table of the electronically controlled two-dimensional motion mechanism, so that the outgoing beam moves with the optical table to scan the micro-nano structure lens to be measured, satisfying the diffraction of the full-aperture range of the micro-nano structure lens efficiency test.
Description
technical field [0001] The invention belongs to the field of optical measurement, and in particular relates to a device and method for testing the diffraction efficiency of a micro-nano structure lens. Background technique [0002] In recent years, micro-nano structured lenses have been widely used in holographic display, laser beam control and shaping, optical imaging and other fields. Diffraction efficiency is an important index to characterize the macroscopic performance of micro-nano-structured lenses, reflecting the utilization efficiency of light energy by micro-nano-structured lenses. The main factors affecting the diffraction efficiency include the design theory approximation, the processing error of the micro-nano structure, the wavelength of the illumination source, and the transmittance of the substrate material. The precise test of diffraction efficiency can provide accurate and reliable data support for the engineering application of micro-nano structure lenses...
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IPC IPC(8): G01M11/02
CPCG01M11/02G01M11/0207
Inventor 刘盾汪利华杨伟吴时彬范斌
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI