Ultra-low-frequency vibration isolator with variable load and design method thereof

Abstract

The invention discloses an ultra-low-frequency vibration isolator with a variable load. The ultra-low-frequency vibration isolator comprises a rectangular shell, a vibration isolation bearing platform, a bearing rod, a first connecting rod, a second connecting rod, a first negative stiffness element, a second negative stiffness element, a fixing plate and a linear elastic element, wherein the first negative stiffness element and the second negative stiffness element are mutually matched to form double negative stiffness, and form positive and negative stiffness in parallel with the linear elastic element. According to the ultra-low-frequency vibration isolator, the ultra-low natural frequency of a vibration isolation system can be realized, the load changed within a certain range can be adapted, the working point of the vibration isolator does not need to be adjusted, the performance stability of the vibration isolator under different vibration isolation loads is maintained, and the influence, on the performance of the vibration isolation system, from the vibration degree is eliminated. In addition, the invention also provides a design method of the ultra-low-frequency vibration isolator with the variable load.

Description

technical field [0001] The invention relates to the field of ultra-low frequency vibration reduction and isolation, and specifically discloses an ultra-low frequency vibration isolator with variable load and a method thereof. [0002] technical background [0003] With the continuous development of a series of ultra-precision machining and measurement technologies represented by ultra-precision machining, semiconductor processing, and micro-nano manufacturing, the machining and measurement accuracy is getting closer and closer to the physical limit, so tiny environmental vibrations may cause Its processing or detection fails. In order to ensure the processing and measurement accuracy, this type of processing and measurement equipment puts forward extremely high requirements for environmental vibration. Generally speaking, environmental vibration is generally distributed in the low frequency and ultra-low frequency range, and is distributed in a certain frequency range. Ther...

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Problems solved by technology

At the same time, the vibration isolator provided by the invention can effectively overcome the disadvantages of poor adaptability to vibration isolation loads of the existing vibration isolation system, has no strict requirements on the working point, and has the advantages of very simple structure and low cost

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