Device and method for assisting integrated circuit near-field scanner in accurate positioning
An integrated circuit and precise positioning technology, which is used in measurement devices, electromagnetic field characteristics, and electronic circuit testing.
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Embodiment 1
[0026] This embodiment discloses a device for assisting the precise positioning of an integrated circuit near-field scanner, including a probe located directly above the integrated circuit to be tested, a computer for displacement scheduling of the probe, and a supporting three-dimensional mobile platform, as well as a prism and a microscope . refer to figure 1 , 100 is the abscissa moving axis of the near-field scanner, which is used to control the position of the probe in the X direction when positioning the probe in space. 200 is the ordinate moving axis of the near-field scanner, which is used to control the position of the probe in the Y direction when positioning the probe in space. 300 is the coordinate movement axis perpendicular to the horizontal plane of the near-field scanner, which is used to control the position of the probe in the Z direction when positioning the spatial position of the probe. The three moving axes are respectively the three reference direction...
Embodiment 2
[0033] Corresponding to the device in the above-mentioned embodiment, this embodiment discloses a method for precise positioning of an auxiliary integrated circuit near-field scanner applied in the above-mentioned device, including the following steps:
[0034] Step S1, fuzzy positioning, first accurately position the X and Y axes through the microscope, move the X and Y axes so that the probe coincides with the origin on the XY plane projection, and then observe with the naked eye, move the probe Z axis down to the distance from the surface of the integrated circuit The first height (for example: about 2mm), where the Z axis is fuzzy positioning.
[0035]Step S2, placing a prism so that the reflection image of the probe and the integrated circuit can be seen in the microscope, so as to enlarge the distance between the observation probe and the integrated circuit.
[0036] Step S3 , based on the first height between the probe and the integrated circuit, move the probe downward...
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