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A target holder component of an ion probe and a method for preparing a sample target thereof

An ion probe and sample target technology, applied in the field of ion probes, can solve problems such as affecting the reproducibility of analysis results, and achieve the effect of reducing reproducibility deterioration and eliminating electric field distortion

Active Publication Date: 2020-10-16
INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI
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  • Abstract
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  • Application Information

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Problems solved by technology

[0003] The study found that during the SIMS sample testing process, there is a position effect, that is, the relative position change of the analysis point directly affects the reproducibility of the analysis results

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  • A target holder component of an ion probe and a method for preparing a sample target thereof
  • A target holder component of an ion probe and a method for preparing a sample target thereof
  • A target holder component of an ion probe and a method for preparing a sample target thereof

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Embodiment Construction

[0027] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0028] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present invention shall have the usual meanings understood by those skilled in the art to which the present disclosure belongs. "First", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. "Comprising" or "comprising" and similar words mean that the elements or items appearing before the word include the elements or items listed after the word and their equivalents, without excluding other elements or items. Words such as "connected" or "connected" are not limited to physical or mechan...

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Abstract

The invention discloses a target holder component of an ion probe and a method for preparing a sample target thereof. Specifically, the target holder assembly includes: a body and a sheet, the middle of the body is provided with a sample target hole, and the sample target hole is away from the mouth of the sample target entry side, and a limiting portion is symmetrically provided; the sheet and the The shape and size of the limiting portion match, and are used to form a recess on the sample target for accommodating the limiting portion. Utilizing the target holder assembly and the sample target preparation method of the present invention, the tungsten plate in the prior art is replaced by the limiting part to realize the limiting of the sample target, and the limiting part abuts against the concave part of the sample target, so that the sample target is set The surface of the sample and the surface of the limit part of the body are basically in the same plane, eliminating the electric field distortion near the edge area caused by the height difference, and reducing the data reproduction caused by the analysis point being too close to the sample target boundary Sexual variation problem.

Description

technical field [0001] The invention relates to the technical field of ion probes, in particular to a target holder component of an ion probe and a sample target preparation method thereof. Background technique [0002] Ion probe (or secondary ion mass spectrometry, Secondary Ion Mass Spectrometry, SIMS for short) refers to an instrument that uses a high-energy ion beam to bombard the surface of a sample, and analyzes the chemical elements and isotope composition of the excited secondary ions. The ion probe has the advantages of high mass resolution, high sensitivity and high analysis precision, its analysis beam spot is small (generally less than 20 microns), and the sample consumption is low (10 -9 grams), has an irreplaceable technical advantage in the field of micro-area in-situ analysis, and is widely used in the fields of earth science, astrogeology and environmental geology. [0003] The study found that during the SIMS sample testing process, there is a position eff...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/62G01N1/32G01N1/34G01N1/36
CPCG01N27/62G01N1/32G01N1/34G01N1/36G01N2001/364G01N2001/366H01J49/0409H01J49/0031
Inventor 李娇李秋立
Owner INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI