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Target holder assembly of ion probe and method for preparing sample target

An ion probe and sample target technology, applied in the field of ion probes, can solve problems such as affecting the reproducibility of analysis results, and achieve the effect of reducing reproducibility deterioration and eliminating electric field distortion

Active Publication Date: 2020-05-12
INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI
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  • Claims
  • Application Information

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Problems solved by technology

[0003] The study found that during the SIMS sample testing process, there is a position effect, that is, the relative position change of the analysis point directly affects the reproducibility of the analysis results

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  • Target holder assembly of ion probe and method for preparing sample target
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  • Target holder assembly of ion probe and method for preparing sample target

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Embodiment Construction

[0027] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0028] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present invention shall have the usual meanings understood by those skilled in the art to which the present disclosure belongs. "First", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. "Comprising" or "comprising" and similar words mean that the elements or items appearing before the word include the elements or items listed after the word and their equivalents, without excluding other elements or items. Words such as "connected" or "connected" are not limited to physical or mechan...

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Abstract

The invention discloses a target holder assembly of an ion probe and a method for preparing a sample target. The target holder assembly comprises a body and sheets; a sample target hole is formed in the middle of the body; limiting parts are symmetrically arranged at the opening, away from a sample target entering side, of the sample target hole; and the sheets are matched with the limiting partsin shape and size, and are used for forming concave parts for accommodating the limiting parts on the sample target. According to the target holder assembly and the method for preparing the sample target, the limiting parts are used for replacing tungsten plates in the prior art to limit the sample target; the limiting parts abut against the concave parts of the sample target, so that the surface,provided with the sample, of the sample target and the surface, provided with the limiting parts, of the body are basically located in the same plane, and therefore, electric field distortion, closeto an edge area, caused by height difference is eliminated, and the problem that data reproducibility becomes poor due to the fact that an analysis point is too close to the boundary of the sample target is solved.

Description

technical field [0001] The invention relates to the technical field of ion probes, in particular to a target holder component of an ion probe and a sample target preparation method thereof. Background technique [0002] Ion probe (or secondary ion mass spectrometry, Secondary Ion Mass Spectrometry, SIMS for short) refers to an instrument that uses a high-energy ion beam to bombard the surface of a sample, and analyzes the chemical elements and isotope composition of the excited secondary ions. The ion probe has the advantages of high mass resolution, high sensitivity and high analysis precision, its analysis beam spot is small (generally less than 20 microns), and the sample consumption is low (10 -9 grams), has an irreplaceable technical advantage in the field of micro-area in-situ analysis, and is widely used in the fields of earth science, astrogeology and environmental geology. [0003] The study found that during the SIMS sample testing process, there is a position eff...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/62G01N1/32G01N1/34G01N1/36
CPCG01N27/62G01N1/32G01N1/34G01N1/36G01N2001/364G01N2001/366H01J49/0409H01J49/0031
Inventor 李娇李秋立
Owner INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI