A kind of preparation method of rotating structure and rotating structure

Abstract

An embodiment of the present invention provides a method for fabricating a rotating structure and the rotating structure, the method comprising: fabricating a first semiconductor structure using a wet etching process, wherein the first semiconductor structure includes a first slope groove on the first surface and The second slope groove located on the second surface; the slope surface of the first slope groove and the slope surface of the second slope groove are both (111) crystal planes; the preparation includes independently arranged first lower electrode connection units and second The lower electrode is connected to the second semiconductor structure of the unit; using a bonding process, the first semiconductor structure is arranged on the second semiconductor structure; a rotatable unit is prepared in a predetermined area of ​​the first semiconductor structure; An upper electrode, a first lower electrode, and a second lower electrode are prepared on one surface side. According to the technical solution provided by the embodiments of the present invention, the inclination angle of the prepared slope surface can be made very small, and the preparation process is simple, which improves the preparation flexibility of the slope surface.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of micro-electro-mechanical systems, and in particular, to a method for manufacturing a rotating structure and the rotating structure. Background technique [0002] In the field of microelectromechanical systems, rotating structures can be applied to wavefront correction of adaptive optics, spatial light modulation, alignment of optical elements, micromanipulators, optical switches, optical attenuators, and optical multiplexers. [0003] According to the different driving methods of the rotating structure, it is mainly divided into: electromagnetic drive, electrothermal drive, piezoelectric drive and electrostatic drive. Electromagnetic driving uses the magnetic force generated by electromagnets or permanent magnets as the driving force. The driving current of this driving method is large, the energy consumption is large, and the manufacture of magnetic films and the application of exte...

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Problems solved by technology

[0005] In order to improve the disadvantages of high driving voltage of the traditional structure, it is a better method to adopt a step plate structure. The more steps the structure is, the closer the structure is to the slope structure, and the corresponding driving voltage will be lower, but at the same time the process becomes more advanced. complex

[0006] Based on this, in the prior art, the preparation process is simple, the performance is stable, and it is difficult to obtain an electrostatically driven rotating structure that does not require a higher voltage driving voltage.

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