Vibration compensation method suitable for laser on-line thickness measurement
A technology of vibration compensation and thickness measurement, which is applied in the direction of optical devices, measuring devices, instruments, etc., can solve problems such as errors and achieve the effect of optimizing precision
Active Publication Date: 2020-08-07
SHENZHEN XINYUREN TECH
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Problems solved by technology
[0005] The present invention mainly aims at the error problem caused by vibration to the measurement results in the current online laser thickness measurement process, and proposes a vibration compensation and precision optimization method, which can analyze the reflection of vibration in the data spectrum from the thickness measurement data, and Better separate the vibration signal, realize vibration compensation and precision optimization of measurement results under the premise of retaining the real thickness fluctuation information
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[0030] In order to make the purpose, scheme and advantages of the present invention clearer, the following examples are given as examples, and the present invention is further described in detail in conjunction with the accompanying drawings. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0031] attached figure 1 It is a flowchart of a vibration compensation method suitable for laser on-line thickness measurement in the present invention; figure 2 It is a flow chart of determining the similarity interval of the spectrum of the strip to be tested and the copper foil through the cosine similarity.
[0032] The present invention takes the lithium-ion battery pole piece rolling process and the onlin...
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The invention belongs to the field of online detection in the thin film manufacturing and processing process, and particularly relates to a vibration compensation method suitable for laser online thickness measurement. The method comprises the following steps that (1) a laser online thickness measurement system is used to perform the online scanning and measurement on a to-be-measured strip and ahigh-precision copper foil in a same measurement environment; (2) the thickness measurement data of the strip and the thickness measurement data of the copper foil both comprise the vibration errors during scanning and measurement, the copper foil manufacturing precision is high, most errors in the data are caused by vibration, and the strip to be measured is also affected by the similar vibration; (3) the spectral analysis is carried out on the thickness measurement data, and the data frequency composition information is observed; and (4) the similarity of the frequency spectrums of the stripto be measured and the copper foil is compared, the data is processed properly, so that the influence of vibration on the online scanning thickness measurement is removed very well, and the vibrationcompensation and the precision optimization of the thickness measurement data are realized.
Description
technical field [0001] The invention belongs to the field of on-line detection during film manufacturing and processing, and more specifically relates to a vibration compensation method suitable for laser on-line thickness measurement. Background technique [0002] Due to the advantages of safety and reliability, high measurement accuracy, and large measurement range, laser thickness measurement is widely used in the thickness detection of paper, lithium-ion battery pole pieces, organic battery films, fuel cell electrodes, and functional films. Film manufacturing mostly adopts low-cost and high-efficiency roll-to-roll manufacturing process. In the process of manufacturing, the thickness measurement in the width direction of the strip needs to adopt multi-sensor or scanning measurement. The latter undoubtedly greatly reduces the cost, but its The unavoidable vibrations introduced during scanning affect the measurement accuracy. [0003] Regarding the control of errors caused...
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IPC IPC(8): G01B11/06
CPCG01B11/06
Inventor 周华民宋华雄杨志明张云周军王云明
Owner SHENZHEN XINYUREN TECH