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A gas micro flow controller and supply device

A technology of flow controller and supply device, which is applied in the direction of valve device, valve operation/release device, gas/liquid distribution and storage, etc., which can solve the problems of high cost, low controllability, high cost, etc., and achieve low cost , high controllability and simple structure

Active Publication Date: 2022-05-06
李羽翠
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] One is to control the small flow by controlling the opening and closing of a special solenoid valve. Although this solution has high precision, the solenoid valve that plays a key role in the flow control part is not a conventional solenoid valve, and its structure is complex and expensive. high cost
[0005] The other is to control the flow rate by passing the gas through the permeable material (such as powder metallurgy material). However, once the porosity of the powder metallurgy material is processed, it will be a certain value, and its flow rate will be a specific value, so variable flow control cannot be realized. low controllability

Method used

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  • A gas micro flow controller and supply device
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  • A gas micro flow controller and supply device

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Experimental program
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Effect test

Embodiment 1

[0024] Embodiment 1 Gas micro-flow controller

[0025] refer to figure 1 , the embodiment of the present invention provides a micro-flow controller for gas, the flow controller 6 mainly includes a housing 61 in the axial direction, which has an air intake at the front end and an air outlet at the rear end, and is arranged inside the housing 61 and connected in sequence from front to back. The heating device, the memory alloy spring 66 and the gasket, the rear end of the gasket is connected with the air outlet port protruding inward on the inner wall of the housing 61 . When working, the temperature of the memory alloy spring 66 is controlled by the heating device to make it stretch or shorten, so as to realize the micro adjustment of the degree of opening and closing between the gasket and the air outlet interface.

[0026] Wherein, the memory alloy material has a shape memory effect. When the heating device heats the memory alloy spring 66, the length of the spring elongates...

Embodiment 2

[0033] Example 2 Gas micro-flow supply device

[0034] refer to Figure 2 to Figure 3 , a gas micro-flow supply device of the present invention includes a high-pressure gas cylinder 1, an on-off valve 2, a pressure-reducing valve 3, a pressure-stabilizing flow reducer 4, a flow controller 6 and a flow meter 7 connected sequentially along the gas path. They are connected by a gas delivery pipe, wherein the flow controller 6 is any one of the gas micro-flow controllers disclosed in Embodiment 1.

[0035] Among them, the high-pressure gas cylinder 1 is used to store the high-pressure gas; the on-off valve 2 is used to realize the on / off of the high-pressure gas and the downstream device, and a solenoid valve can be used in practical applications; the pressure-reducing valve 3 is used to decompress the high-pressure gas to ( 0.2±0.02) Mpa; the stabilized pressure reducer is used to stabilize the pressure and reduce the flow; the flow rate of the flow controller 6 can reach 10sccm...

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Abstract

The invention relates to a gas micro-flow controller and a supply device. The flow controller (6) includes a housing (61) with air intake at the front end and air outlet at the rear end, and a housing (61) arranged inside the housing (61) and connected sequentially from front to back. The heating device, the memory alloy spring (66) and the gasket, the rear end of the gasket is connected with the air outlet port protruding inward on the inner wall of the housing (61). The flow controller of the present invention is simple in structure and low in cost, and effectively utilizes the property that the structure of the memory alloy changes with temperature changes to adjust the compression degree between the gasket and the air outlet interface, change the opening degree of the sealing cavity in the flow controller and further Realize micro-adjustment of gas micro-flow, with high controllability, and can meet downstream requirements for gas micro-flow and high precision. The flow supply device using the above-mentioned flow controller also has the above-mentioned advantages. The pressure-stabilizing flow reducer is a combination of a small-diameter air guide tube and a heating wire wrapped around the outer wall, which has a simple structure and low cost.

Description

technical field [0001] The invention relates to the technical field of gas supply, in particular to a gas micro-flow controller and a supply device. Background technique [0002] Gas supply devices are widely used in industrial fields, mainly for supplying gas medium. In the field of aviation and aerospace, gas supply devices are often required to provide micro-flow gas. Especially in aerospace electric propulsion systems, due to the limited gas capacity and the high price of xenon, a commonly used gas for electric propulsion, micro-flow gas must be provided in accordance with the corresponding requirements, and the diameter reaches the micron level. The more mature and common gas supply devices in the industry have a large flow rate, and the gas flow accuracy is low, and the flow stability is poor. Therefore, it is necessary to provide a gas micro-flow supply device. [0003] The existing gas micro-flow supply devices mainly include the following two types: [0004] One ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16K31/70F16K1/00F16K1/36F17D3/01
CPCF16K31/002F16K1/00F16K1/36F17D3/01
Inventor 李羽翠党亮李羽翡张德荣
Owner 李羽翠