A gas micro flow controller and supply device

Abstract

The invention relates to a gas micro-flow controller and a supply device. The flow controller (6) includes a housing (61) with air intake at the front end and air outlet at the rear end, and a housing (61) arranged inside the housing (61) and connected sequentially from front to back. The heating device, the memory alloy spring (66) and the gasket, the rear end of the gasket is connected with the air outlet port protruding inward on the inner wall of the housing (61). The flow controller of the present invention is simple in structure and low in cost, and effectively utilizes the property that the structure of the memory alloy changes with temperature changes to adjust the compression degree between the gasket and the air outlet interface, change the opening degree of the sealing cavity in the flow controller and further Realize micro-adjustment of gas micro-flow, with high controllability, and can meet downstream requirements for gas micro-flow and high precision. The flow supply device using the above-mentioned flow controller also has the above-mentioned advantages. The pressure-stabilizing flow reducer is a combination of a small-diameter air guide tube and a heating wire wrapped around the outer wall, which has a simple structure and low cost.

Description

technical field [0001] The invention relates to the technical field of gas supply, in particular to a gas micro-flow controller and a supply device. Background technique [0002] Gas supply devices are widely used in industrial fields, mainly for supplying gas medium. In the field of aviation and aerospace, gas supply devices are often required to provide micro-flow gas. Especially in aerospace electric propulsion systems, due to the limited gas capacity and the high price of xenon, a commonly used gas for electric propulsion, micro-flow gas must be provided in accordance with the corresponding requirements, and the diameter reaches the micron level. The more mature and common gas supply devices in the industry have a large flow rate, and the gas flow accuracy is low, and the flow stability is poor. Therefore, it is necessary to provide a gas micro-flow supply device. [0003] The existing gas micro-flow supply devices mainly include the following two types: [0004] One ...

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Problems solved by technology

[0004] One is to control the small flow by controlling the opening and closing of a special solenoid valve. Although this solution has high precision, the solenoid valve that plays a key role in the flow control part is not a conventional solenoid valve, and its structure is complex and expensive. high cost

[0005] The other is to control the flow rate by passing the gas through the permeable material (such as powder metallurgy material). However, once the porosity of the powder metallurgy material is processed, it will be a certain value, and its flow rate will be a specific value, so variable flow control cannot be realized. low controllability

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