Silicon micro-flow velocity meter with adjustable mechanical sensitivity and measurement range

Abstract

The invention discloses a three-layer structure scheme of a silicon micro-flow velocity meter, which can realize micro-flow velocity sensitivity, mechanical sensitivity and adjustable measurement range. A metal stand column serves as a signal receiving layer, a silicon micromechanical structure serves as a signal conversion layer, and a glass insulating layer and a signal lead of the glass insulating layer serve as a signal output layer. The metal stand column is bonded to the center of the upper surface of the silicon micro-mechanical structure through ultraviolet curing glue, the silicon micro-mechanical structure is fixed to the upper surface of the glass insulating layer through the silicon-glass bonding technology, anchor points of the silicon micro-mechanical structure correspond tometal leads of the glass insulating layer in position, and therefore input and output control over electric signals is achieved. Alternating current driving voltages with different direct current biassignals are applied to the two tuning fork type resonators, and the electrostatic coupling stiffness of the electrostatic weak coupling resonance structure is changed due to the electrostatic negative stiffness effect, so that the mechanical sensitivity and the measurement range of the silicon micro-flow meter are further changed.

Description

Technical field [0001] The invention relates to the field of microelectromechanical systems and microfluid sensitivity, in particular to a silicon micro-velocimeter with adjustable mechanical sensitivity and measuring range. Background technique [0002] Micro Electro Mechanical System (MEMS) sensors, as key devices for acquiring information, play a huge role in the miniaturization of various sensing devices. They have been used in space satellites, launch vehicles, aerospace equipment, aircraft, and other It has been widely used in various fields such as vehicles, special medicine and consumer electronics. [0003] Silicon micro-velocimeter is a sensor that combines microelectronic technology and micromachining technology. The silicon micro-velocimeter can continuously measure the fluid velocity in the surrounding flow field. It can be applied to the environmental velocity measurement in the electric power, steel, petrochemical, energy-saving and other industries, and it has been...

AI Technical Summary

Problems solved by technology

However, at present, most of the researches on silicon micro-flow meters cannot take into account the two important indicators of mechanical sensitivity and measurement range, that is, the greater the mechanical sensitivity, the smaller the measurement range.

Conversely, to increase the measurement range, a sacrifice must be made in mechanical sensitivity

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