Silicon micro-flow meter with adjustable mechanical sensitivity and measurement range

Abstract

The invention discloses a three-layer structure scheme of a silicon micro-flow velocity meter, which can realize micro-flow velocity sensitivity, mechanical sensitivity and adjustable measurement range. The structure comprises a metal stand column which serves as a signal receiving layer, a silicon micromechanical structure which serves as a signal conversion layer, and a glass insulating layer and a signal lead of the glass insulating layer which serve as a signal output layer. The metal stand column is bonded to the center of the upper surface of the silicon micro-mechanical structure through ultraviolet curing glue, the silicon micro-mechanical structure is fixed to the upper surface of the glass insulating layer through the silicon-glass bonding technology, anchor points of the siliconmicro-mechanical structure correspond to metal leads of the glass insulating layer in position, and therefore input and output control over electric signals is achieved. Alternating current driving voltages with different direct current bias signals are applied to the two tuning fork type resonators, and the electrostatic coupling stiffness of the electrostatic weak coupling resonance structure is changed due to the electrostatic negative stiffness effect, so that the mechanical sensitivity and the measurement range of the silicon micro-flow meter are further changed.

Description

technical field [0001] The invention relates to the sensitive fields of micro-electromechanical systems and micro-fluids, in particular to a silicon micro-flow meter with adjustable mechanical sensitivity and measuring range. Background technique [0002] Micro Electro Mechanical System (MEMS) sensor, as a key device for obtaining information, plays a huge role in promoting the miniaturization of various sensing devices. It has been used in space satellites, launch vehicles, aerospace equipment, aircraft, various It has been widely used in the fields of various vehicles, biomedicine and consumer electronics. [0003] Silicon micro flowmeter is a sensor combining microelectronic technology and micromachining technology. The silicon micro flow meter can continuously measure the fluid flow velocity of the surrounding flow field, which can be applied to the measurement of the environmental flow velocity in the industries of electric power, steel, petrochemical, energy saving, e...

AI Technical Summary

Problems solved by technology

However, at present, most of the researches on silicon micro-flow meters cannot take into account the two important indicators of mechanical sensitivity and measurement range, that is, the greater the mechanical sensitivity, the smaller the measurement range.

Conversely, to increase the measurement range, a sacrifice must be made in mechanical sensitivity

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