The invention discloses an MEMS
gyroscope and a preparation and packaging method thereof. The MEMES
gyroscope is of a
tuning fork type
gyroscope structure and comprises an outer frame, a
mass block, an
anchor point, a driving unit, a detection unit, a first-stage elastic connecting beam, a second-stage elastic connecting beam and a
coupling elastic connecting beam. The
driving mode is in-plane reverse oscillation motion of the two
mass blocks relative to the outer frame, and the sensing mode is in-plane torsional
pendulum motion of the whole structure. Detected
Coriolis force signals are output in a differential mode through the induction electrodes located at the four corners of the outer frame. Through the driving
mass block of the MEMS gyroscope, full
coupling is achieved, meanwhile, fewer
anchor point structures are provided, errors caused by
machining errors and packaging stress can be effectively restrained, and therefore the precision and performance of the MEMS gyroscope are improved. According to the preparation and packaging method provided by the invention, vacuum packaging of the device is realized by using a
wafer level vacuum bonding method, the difficulty of device design, preparation and
electrical wiring is reduced, and the method is simple and efficient.