Upper plate frame of photoetching machine
A technology of lithography machine and plate frame, which is applied in the direction of optomechanical equipment, microlithography exposure equipment, optics, etc., can solve the problems of low disassembly efficiency, difficult disassembly, rusty bolts and slipping wires, etc., and achieves simple operation Fast, reasonable structure, convenient operation, simple and fast effect
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[0022] Below in conjunction with the accompanying drawings of the present invention in embodiments, the technical solutions in the embodiments of the present invention are clearly and completely described, obviously, the described embodiments are merely part of embodiments of the present invention rather than all embodiments.
[0023] In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", " orientation or positional relationship of an outer "," front end "," rear "," ends "," end "," other end "or the like indicating a positional relationship of the orientation shown in the accompanying drawings, this is merely for convenience of description invention and simplicity of description, means or not indicate or imply element referred to must have a particular orientation, the orientation of a particular configuration and operation, can not be construed as limiting the present inven...
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