Surface Density Measurement Compensation System
A compensation system and surface density technology, applied in the electronic field, can solve problems such as reducing the accuracy of surface density measurement, and achieve the effect of eliminating adverse effects and improving accuracy
Active Publication Date: 2022-02-22
CONTEMPORARY AMPEREX TECH CO
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Problems solved by technology
The air density is greatly affected by environmental factors, such as temperature, airflow pressure, humidity, etc., so that the measurement results in the area density measurement are also greatly affected, and cannot be ignored. The corresponding air gaps of different parts of the sample to be tested The environmental factors are different, which will affect the measurement results of areal density measurement and reduce the accuracy of areal density measurement
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[0017] Features and exemplary embodiments of various aspects of the invention will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is only to provide a better understanding of the present invention by showing examples of the present invention. The present invention is by no means limited to any specific configurations and algorithms presented below, but covers any modification, substitution and improvement of elements, components and algorithms without departing from the spirit of the invention. In the drawings and the following description, well-known structures and techniques have not been shown in order to avoid unnecessarily obscuring the present invention.
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The invention provides a surface density measurement and compensation system, which relates to the field of electronics. The areal density measurement compensation system includes: a radiation measuring device, which is used to transmit a radiation signal to the sample to be tested and receive an electronic signal transmitted through the sample to be tested. The radiation measuring device includes a radiation source box and an ionization chamber, a radiation source box and an ionization chamber. There is an air gap between the chambers; the temperature measuring device is used to obtain the temperature of the sample to be tested and the air temperature of the air gap, and the sample to be tested is placed in the air gap for measurement; the data processing device is used to obtain the temperature of the sample to be tested according to the electronic signal, the sample to be tested The surface density to be compensated and the compensated surface density of the sample to be tested are obtained by using the temperature, air temperature and current compensation coefficient, and the surface density measurement results are obtained based on the surface density to be compensated and the compensated surface density. Using the technical scheme of the invention can improve the accuracy of surface density measurement.
Description
technical field [0001] The invention belongs to the field of electronics, in particular to a surface density measurement compensation system. Background technique [0002] The surface density measurement of the ray source is a method of calculating the surface density of the sample to be tested by using the electronic signal received after the ray source ray penetrates the sample to be tested. The radiation measurement device includes a scanning frame, a radiation source and an ionization chamber. The sample to be tested is placed between the ray source and the ionization chamber, and the surface density of the sample to be tested is calculated according to the electronic signal received by the ionization chamber probe during the scanning of the sample to be tested. [0003] In order to avoid scraping the sample to be tested, there is an air gap between the radiation source and the ionization chamber. This air gap also absorbs the electrons of the radiation emitted by the ...
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IPC IPC(8): G01N9/24
CPCG01N9/24
Inventor 熊文登廖能武
Owner CONTEMPORARY AMPEREX TECH CO