Integrated flexible temperature and pressure sensor, its preparation method and system for non-planar temperature measurement
A pressure sensor and temperature sensor technology, which is applied in the measurement of the property force of piezoelectric resistance materials, thermometers and thermometers with directly sensitive electrical/magnetic components, etc., can solve the problem of inability to accurately judge whether the temperature sensor is well attached It can solve the problems such as the surface to be tested, and achieve the effect of promoting use, good processing technology and improving accuracy.
Active Publication Date: 2021-09-28
DALIAN UNIV OF TECH
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[0003] In order to solve the problem that it is impossible to accurately judge whether the temperature sensor fits the surface to be tested well during the use of the flexible temperature sensor, an integrated flexible temperature and pressure sensor preparation method is proposed, including the following steps:
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[0027] Flexible temperature sensors are widely used in the measurement of non-planar surfaces such as curved surfaces and human tissue. When measuring, the present invention first uses the flexible pressure sensor to measure the pressure between the temperature sensor and the contact surface to judge whether the sensor is in good contact with the non-plane, and then measures the temperature, which can ensure the accuracy of temperature measurement to a greater extent. Based on the flexible temperature sensor, the present invention integrates a flexible pressure sensor, and uses the flexible pressure sensor to monitor the contact between the temperature sensor and the surface to be measured, so that the temperature measurement is more accurate.
[0028] figure 1 It is a structural representation of an integrated flexible temperature and pressure sensor. The sensor includes a flexible substrate represented by polyimide, a temperature sensor with metal as a sensitive resistor, an...
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Abstract
An integrated flexible temperature and pressure sensor, a preparation method thereof, and a system for non-planar temperature measurement belong to the field of sensor design and processing. In order to solve the problem that it is impossible to accurately judge whether the temperature sensor fits the surface to be tested well during the use of the flexible temperature sensor, the key point is to use a sensor with a flexible material as the substrate, including a flexible temperature sensor and a flexible pressure sensor. The flexible temperature sensor uses metal as the temperature sensor. Sensitive resistors, flexible pressure sensors use carbon-based materials as sensitive resistors, and flexible temperature sensors and flexible pressure sensors are integrated through flexible substrate materials. The effect is to improve the accuracy of temperature measurement and greatly facilitate the popularization and use of flexible temperature sensors.
Description
technical field [0001] The invention belongs to the field of sensor design and processing, and relates to a preparation method of an integrated flexible temperature and pressure sensor. Background technique [0002] Flexible temperature sensors are widely used in the measurement of non-planar surfaces such as curved surfaces and human tissues, and have the advantages of good fit and accurate measurement. The flexible temperature sensor needs to form good contact with the measured surface during use, usually by applying external force (including the use of adhesive tape, etc.), but with the weakening of the external force or the movement of the measured surface, the temperature sensor and the measured surface are often caused. This is a big problem in the use of temperature sensors, so how to judge whether the contact is good or not has become an urgent problem to be solved. Contents of the invention [0003] In order to solve the problem that it is impossible to accuratel...
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IPC IPC(8): G01K7/16G01L1/18
CPCG01K7/16G01L1/18
Inventor 汪家奇
Owner DALIAN UNIV OF TECH