Corrector transfer optics for lorentz em
A technology of charged particle microscope and corrector, which is applied in the direction of electrical components, circuits, discharge tubes, etc., and can solve the problems of reducing the performance of the microscope
Pending Publication Date: 2021-02-02
FEI CO
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However, when a microscope is capable of operating in more than one mode of operation, a change in one microscope component can improve microscope performance in a first mode while degrading microscope performance in a second, different mode
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[0013] A charged particle microscope with optimized performance across multiple modes of operation is disclosed herein. More specifically, the present disclosure includes an improved charged particle microscope that enhances and / or optimizes the performance of the microscope in both standard and Lorentzian modes of operation. The charged particle microscope includes an additional transfer lens between the corrector and the conventional transfer lens, which allows the flexibility to optimize performance in both standard and Lorentzian modes of operation. For example, in the Lorentzian mode of operation, the modified charged particle microscope according to the present disclosure can be used to tune C with the first transfer lens. 5 aberrations while having little effect on defocus and / or C S aberrations. Additionally, the inclusion of an additional transfer lens provides an additional degree of freedom for the charged particle microscope disclosed herein, with which to separa...
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Charged particle microscopes having an optimized performance across multiple modes of operation are disclosed herein. More specifically, the disclosure includes improved charged particle microscopes that increase and / or optimize the performance of the microscope in both a standard mode of operation and a Lorentz mode of operation. The charged particle microscopes include an extra transfer lens between a corrector and the traditional transfer lens which allows for the flexibility to optimize performance in both the standard mode of operation and the Lorentz mode of operation. For example, in aLorentz mode of operation, improved charged particle microscope according to the present disclosure can be used to tune the C5 aberration, while hardly affecting defocus and / or Cs aberrations. Additionally, the inclusion of the extra transfer lens provides the charged particle microscopes disclosed herein with an extra degree of freedom with which to zero defocus and total Cs and C5.
Description
Background technique [0001] The magnification and resolution of microscopes need to continue to increase so that scientists and engineers can continue to explore and develop technologies at smaller and smaller scales. To achieve this, microscope components are continuously being improved to improve microscope performance (i.e., increase resolution, increase magnification, reduce aberrations, etc.). However, when a microscope is capable of operating in more than one mode of operation, a change in one microscope component can improve microscope performance in a first mode while reducing microscope performance in a second, different mode. Accordingly, the development of microscopes that improve and / or allow optimization of microscope performance across multiple modes of operation is desired. Contents of the invention [0002] According to the present disclosure, a charged particle microscope having optimized performance in both a standard mode of operation and a Lorentzian mod...
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IPC IPC(8): H01J37/26H01J37/22H01J37/20
CPCH01J37/20H01J37/22H01J37/261H01J37/266H01J37/153H01J2237/1534H01J2237/262H01J2237/28H01J2237/2802H01J37/141H01J37/28H01J2237/14
Inventor A·亨斯特拉
Owner FEI CO