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Phosphorus source constant temperature equipment

A constant temperature equipment and phosphorus source technology, applied in the direction of instruments, electrical components, climate sustainability, etc., can solve problems such as irritating odor, easy volatilization of phosphorus oxychloride, production safety issues, etc., and achieve the effect of ensuring safe use

Pending Publication Date: 2021-02-02
李铁
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Phosphorus oxychloride is volatile, has a strong pungent smell, and is highly corrosive. Once leaked, it will bring production safety problems

Method used

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  • Phosphorus source constant temperature equipment
  • Phosphorus source constant temperature equipment
  • Phosphorus source constant temperature equipment

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Embodiment Construction

[0018] In order to have a further understanding of the purpose, structure, features, and functions of the present invention, the following detailed descriptions are provided in conjunction with the embodiments.

[0019] Please refer to figure 1 and figure 2 , figure 1 It is the front view of a kind of phosphorus source constant temperature equipment of Embodiment 1 of the present invention; figure 2 It is a schematic diagram of the internal structure of a phosphorus source constant temperature equipment in Example 1 of the present invention.

[0020] A kind of phosphorus source constant temperature equipment 100 of the present invention comprises shell 10, constant temperature box body 20 and control module 30, and constant temperature box body 20, control module 30 are arranged in the inside of shell 10; Also comprises phosphorus oxychloride gas detection probe 40 and The emergency ventilation device 50, the phosphorus oxychloride gas detection probe 40 is arranged on th...

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Abstract

The invention provides phosphorus source constant-temperature equipment. The phosphorus source constant-temperature equipment comprises a shell, a constant-temperature box body and a control module, wherein the constant temperature box further comprises a phosphorus oxychloride gas detection probe and an emergency air suction and exhaust device, the phosphorus oxychloride gas detection probe is arranged on the inner wall of the constant temperature box body and used for detecting the concentration of phosphorus oxychloride gas in the constant temperature box body, and the phosphorus oxychloride gas detection probe is electrically connected with the control module; the emergency air pumping and exhausting device comprises a vortex air pump, and the vortex air pump is electrically connectedwith the control module. The phosphorus source constant-temperature equipment is provided with the phosphorus oxychloride gas detection probe used for detecting the concentration of phosphorus oxychloride gas in the constant-temperature box body, and when the concentration of phosphorus oxychloride gas exceeds the limit, the system sends out an alarm signal; and the emergency air suction and exhaust device is arranged and used for conducting emergency air suction and exhaust when the phosphorus source leaks, leaked gas in the constant-temperature box body is exhausted into a connected tail gastreatment system, and therefore use safety is guaranteed.

Description

technical field [0001] The invention relates to the technical field of solar photovoltaic production equipment, in particular to a phosphorus source constant temperature equipment used for corroding the surface of silicon wafers in the production process of solar cells. Background technique [0002] The diffusion process is the core of the solar cell process, which is directly related to the conversion efficiency of the solar cell. Many factors will affect the diffusion process, among which the diffusion source phosphorus oxychloride (POCl 3 ) The constant temperature is crucial to the diffusion process, so a constant temperature device is needed to ensure that the temperature of the phosphorus source is constant. PSS (Phosphorus Safe Supply) system, also known as phosphorus source safety supply system, is a kind of airtight precision constant temperature equipment, which is often used for constant temperature storage of phosphorus source. Phosphorus oxychloride is volatile...

Claims

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Application Information

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IPC IPC(8): H01L21/67H01L31/18G01N33/00B65D25/02
CPCB65D25/02G01N33/0036G01N33/0063G01N33/0067H01L21/67253H01L31/18Y02P70/50
Inventor 李铁
Owner 李铁