A Four-phase Coupled Inductor on Chip with Closed Magnetic Circuit
A technology of coupled inductance and closed magnetic circuit, applied in the direction of inductance with magnetic core, parts of transformer/inductor, transformer/inductor coil/winding/connection, etc., can solve the problem of low coupling coefficient of multi-phase inductance, Achieve the effects of reducing ripple current, improving power efficiency, and increasing saturation current
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[0029] The four-phase coupled inductor on a closed magnetic circuit chip provided in the embodiment is prepared on a silicon chip through a microfabrication process. The winding is made of metallic copper, with a thickness of 50 μm, a width w of 35 μm, and a coil gap g of 15 μm. The inductor has an extremely low DC resistance of about 61mΩ, which enables the inductor to still have low DC loss under large DC bias. Anisotropic core film width W m =250μm, length L m = 600 μm. The isotropic magnetic core is arc-shaped, R=150μm, closely connected with the anisotropic magnetic core. Material selection of isotropic magnetic core and anisotropic magnetic core [Ni 80 Fe 20 / SiO 2 ] 40 Multi-layer magnetic core film with a thickness of 6μm. The hard-axis magnetic permeability of the anisotropic magnetic core film is 1000, and the magnetic permeability of the isotropic magnetic core film in any direction in the plane is 750.
[0030] The simulation diagram of the inductance valu...
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