An integrated push-pull structure quartz resonant pressure sensor

Abstract

An integrated push-pull structure quartz resonant pressure sensor, including an integrated push-pull structural element, the integrated push-pull structural element is connected with two quartz double-end fixed support tuning forks, the upper part of the integrated push-pull structural element and two quartz double-end fixed support tuning forks The upper chamber is connected externally to form an upper chamber, which is vacuum-encapsulated; the lower part of the one-piece push-pull structural element is connected to a lower cover to form a lower chamber, which is a PCB installation chamber and is normally sealed; two quartz double-ended fixed-branched tuning forks are installed On the central axis of the flexible frame, it is installed symmetrically up and down, left and right; the flexible frame and the fixed frame are fixed at the center line, and the upper and lower places are separated to ensure the symmetry of the installation of the quartz double-end fixed support tuning fork; by measuring two quartz double-end fixed support The frequency of the tuning fork changes, and the pressure information to be measured can be obtained. It has the characteristics of quasi-digital signal output, high precision, and high stability.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronics (MEMS) digital pressure sensors, and in particular relates to an integrated push-pull structure quartz resonant pressure sensor. Background technique [0002] In the field of resonant pressure sensors, apart from the core resonant element, the most important thing about the pressure sensor is its pressure conversion part, which is the structural part that transmits the pressure conversion to be measured to the resonant element; and the pressure conversion part is usually a structure composed of multiple small structures. Composition, assembly and connection are usually completed by welding, bonding, etc. after processing and manufacturing, which leads to residual stress, gaps and assembly errors in the sensor substrate, which will affect the long-term stability and accuracy of the sensor. Contents of the invention [0003] In order to overcome the above-mentioned shortcomings...

AI Technical Summary

Problems solved by technology

[0002] In the field of resonant pressure sensors, apart from the core resonant element, the most important thing about the pressure sensor is its pressure conversion part, which is the structural part that transmits the pressure conversion to be measured to the resonant element; and the pressure conversion part is usually a structure composed of multiple small structures. Composition, assembly and connection are usually completed by welding, bonding, etc. after the completion of processing and manufacturing, which leads to residual stress, gaps and assembly errors in the sensor substrate, which will affect the long-term stability and accuracy of the sensor

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