Micro-hemispherical resonant gyroscope based on borosilicate glass annealing forming and manufacturing method thereof

Abstract

The invention discloses a micro-hemispherical resonant gyroscope based on borosilicate glass annealing forming and a manufacturing method thereof. A silicon wafer serves as a substrate to form a silicon substrate. A cylindrical cavity and a center supporting column in the circle center of the cavity are etched on the upper surface of the silicon wafer. The center supporting column is connected with the center of a hemispherical harmonic oscillator to form a suspended structure. Meanwhile, eight flat-plate electrodes are evenly distributed around the hemispherical harmonic oscillator and on the periphery of the cylindrical cavity of the upper surface of the silicon wafer. The eight flat-plate electrodes are composed of four drive electrodes and four detection electrodes, all the drive electrodes, the detection electrodes and the hemispherical harmonic oscillator are not in contact and have same gaps, and the drive electrodes and the detection electrodes are sequentially distributed at intervals. The glass metal blowing type micro-hemispherical resonant gyroscope manufactured through the method has stable performance and a wider application range because of the advantages of being simple in structure, low in surface stress, high in symmetry and the like.

Description

technical field [0001] The invention belongs to the technical field of micro inertial sensors in MEMS, in particular to a micro hemispherical resonant gyroscope based on borosilicate glass annealing and a manufacturing method. Background technique [0002] With the development of national defense technology and civilian industry, gyroscopes have become very important inertial devices in the fields of attitude control, navigation and positioning. Among them, the hemispherical resonant gyroscope is recognized as the best performance due to its precise scaling factor, satisfactory random drift and bias stability, and insensitivity to the external environment (acceleration, vibration, temperature, etc.). One of the gyro products. The precision of hemispherical resonant gyroscope is even higher than that of fiber optic gyroscope and laser gyroscope, and it also has the advantages of high resolution, wide measurement range, anti-overload, anti-radiation, and anti-interference. T...

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Problems solved by technology

However, this type of technology has problems such as high equipment requirements, large surface stress, low yield, low electrode consistency, and difficulty in ensuring symmetry.

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